Abstract
The capability of Total Reflection X-ray Fluorescence spectrometry (TXRF) for the analysis of the elemental composition of contaminants in and on surfaces is described. Instrumental aspects are discussed in this context. Detection limits better than 1010 at/cm2 or 0.2 pg on a surface area of 2 mm in diameter have been obtained. The unique sensitivity of TXRF allows the determination of metals in airborne particles at a concentration level as low as 10 ng/m3. The question as to whether contaminants are located on, or embedded in, a surface has been answered by recording the fluorescence intensities as a function of the incident angle of the primary beam.
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References
Y. Yoneda and T. Horiuchi, Rev. Sci. Instrum., 42, 1069 (1971).
J. Knoth and H. Schwenke, Fresenius Z. Anal. Chem., 301 , 7 (1980).
A. Prange, Spectrochimica Acta, 44B, No. 5, 437 (1989).
P. Eichinger, H.J. Rath and H. Schwenke, in “Semiconductor Fabrication: Technology and Meterology”, ASTM STP 990, D.C. Gupta, Editor, American Society for Testing and Materials, 1988.
H. Schwenke, W. Berneike, J. Knoth and U. Weisbrod, Adv. X-ray Analysis, 32, 105 (1989).
W.B. Yun and J.M. Bloch, J. Appl. Phys. 68(4), 1421 (1990).
Technical Note: EXTRA II, Rich. Seifert & Co., Bogenstr. 41, 2070 Ahrensburg, Germany,
A. Prange, K. Kramer and U. Reus, Spectrochimica Acta, in press.
B. Schneider, Spectrochimica Acta, 44B No 5, 519 (1989).
A. Prange, Adv. X-ray Analysis, 32, 211 (1989).
M. Born and E. Wolf, “Principles of Optics”, Pergamon Press, New York (1965).
L.G. Parratt, Phys. Rev., 95, 359 (1954).
B. Pardo, T. Megademini and J.M. André, Revue Phys. Appl., 23, 1579 (1988).
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© 1991 Springer Science+Business Media New York
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Schwenke, H., Knoth, J., Weisbrod, U. (1991). Analysis of Particles on Surfaces by Total Reflection X-Ray Fluorescence Spectrometry. In: Mittal, K.L. (eds) Particles on Surfaces 3. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-2367-7_11
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DOI: https://doi.org/10.1007/978-1-4899-2367-7_11
Publisher Name: Springer, Boston, MA
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Online ISBN: 978-1-4899-2367-7
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