Abstract
In recent years a number of techniques have been developed which have allowed semiconductor devices to be fabricated with ever-smaller feature sizes. Using MBE and MOCVD epitaxial growth techniques,(1) the composition of semiconductor wafers can be controlled on atomic length scales. This leads to potential variations along one (growth) direction that vary on scales as small as one atomic layer. Using electron-beam and x-ray lithographies, it has also become possible to pattern gates with characteristic features on the scale of a few tens of nanometers. These small scales are comparable to the wavelengths of the electrons and holes within the devices. In this regime, device modeling cannot be based on a classical picture augmented by quantum corrections and parameters; it must incorporate quantum mechanics at a fundamental level.
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Kriman, A.M., Kluksdahl, N.C., Ferry, D.K., Ringhofer, C. (1992). Wigner Function Modeling of the Resonant Tunneling Diode. In: Ferry, D.K., Jacoboni, C. (eds) Quantum Transport in Semiconductors. Physics of Solids and Liquids. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-2359-2_11
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