Skip to main content
SpringerLink
Log in

High-Speed Techniques

  • Chapter
Electron Beam Testing Technology

Part of the book series: Microdevices ((MDPF))

  • 228 Accesses

Abstract

The introduction of stroboscopy in the SEM, one of the key elements in the evolution of EBT, provided the ability to observe high-frequency voltage contrast on the DUT. Chapter 6 considers quantification of the technique, discussing high-speed waveform measurements via sampling techniques. The topics covered include a description of sampling and measurement techniques; essential elements of the sampling instrumentation, namely, electron pulse production, signal synchronization, and phase shift; and finally, very high-speed techniques in the picosecond time regime, where fundamental physical limits and additional instrumentation-related factors come into play. This latter inclusion is occasioned by the recognition that EBT with its high temporal and spatial resolutions and minimal circuit-loading properties has an important role to play in characterizing high-speed devices and circuits.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 179.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. K. Nakamae, S. Fujita, H. Fujioka, and K. Ura, Jpn. J. Appl. Phys. series 3, 357 (1989).

    Google Scholar 

  2. D. J. Machin, D. W. Ranasinghe, and G. Proctor, Microelectron. Eng. 7, 201 (1987).

    Article  Google Scholar 

  3. H. Fujioka and K. Ura, J. Phys. E 18, 284 (1985).

    Article  ADS  Google Scholar 

  4. M. Ostrow, E. Menzel, E. Postulka, S. Görlich, and E. Kubalek, in: Scanning Electron Microscopy 1982/II, SEM, Inc., AMF O’Hare, IL, pp. 563–572 (1982).

    Google Scholar 

  5. H. P. Feuerbaum, Scanning 5, 14 (1983).

    Article  Google Scholar 

  6. H. Todokoro, S. Fukuhara, S. Scitou, H. Shinada, and N. Yamaguchi, Microelectron. Eng. 9, 411 (1989).

    Article  Google Scholar 

  7. D. F. Spicer and J. N. Sackett, J. Vac. Sci. Technol. B 4, 213 (1986).

    Article  Google Scholar 

  8. H. Fujioka, K. Nakamae, M. Hirota, K. Ura, and S. Takashima, J. Phys. E 22, 138 (1989).

    Article  ADS  Google Scholar 

  9. H. P. Feuerbaum and J. Otto, in: Scanning Electron Microscopy 1982JIV, SEM, Inc., AMF O’Hare, IL, pp. 1501–5 (1982).

    Google Scholar 

  10. S. Görlich, K. D. Herrmann, W. Reiners, and E. Kubalek, in: Scanning Electron Microscopy 1986/II, SEM, Inc., AMF O’Hare, IL, pp. 447–64 (1986).

    Google Scholar 

  11. H. Todokoro, S. Fukuhara, and T. Komoda, in: Scanning Electron Microscopy 1983/II, SEM, Inc., AMF O’Hare, IL, pp. 561–68 (1983).

    Google Scholar 

  12. K. Ookubo, Y. Goto, Y. Furukawa, and T. Inagaki, in: Electron Microscopy 1986, vol. 1 (T. Imura, S. Maruse and T. Suzuki, eds.), Jap. Soc. Electron Microsc, Tokyo, pp. 631–32 (1986).

    Google Scholar 

  13. H. P. Feuerbaum, in: Scanning Electron Microscopy 1979J1, SEM, Inc., AMF O’Hare, IL, pp. 285–96 (1979).

    Google Scholar 

  14. T. Sano, M. Miyoshi, S. Asami, and K. Okumura, Electron Microscopy 1986, vol. 1 (T. Imura, S. Maruse, and T. Suzuki, eds.), Jap. Soc. Electron Microsc, Tokyo, pp. 633–34 (1986).

    Google Scholar 

  15. E. Menzel, Microelectron. Eng. 12, 81 (1990).

    Article  Google Scholar 

  16. H. Todokoro, S. Fukuhara, H. Shinada, S. Scitou, T. Satou, Microelectron. Eng. 12, 417 (1990).

    Article  Google Scholar 

  17. P. Cochrane, in: Microwave Measurement (A. E. Bailey, ed.), Peregrinus, London, pp. 252–53 (1985).

    Google Scholar 

  18. H.-D. Brust, Microelectron. Eng. 12, 105 (1990).

    Article  Google Scholar 

  19. B. Lischke, D. Winkler, and R. Schmitt, Microelectron. Eng. 7, 21 (1987).

    Article  Google Scholar 

  20. J. H. Shoaf, D. Haiford, and A. S. Risley, Frequency Stability Specification and Measurement: High-Frequency and Microwave Signals, NBS Technical Note 632, National Bureau of Standards, Washington, DC (1973).

    Google Scholar 

  21. W. P. Robins, Phase Noise in Signal Sources, Peregrinus Ltd., London, pp. 93–171 (1982).

    Google Scholar 

  22. W. L. Gans and J. R. Andrews, Time Domain Automatic Network Analyzer for Measurement of RF and Microwave Components, NBS Technical Note 672, National Bureau of Standards, Washington, DC, pp. 108–24 (1975).

    Google Scholar 

  23. W. L. Gans, IEEE Trans. Instrum. Meas. IM-32, 126 (1983).

    Article  Google Scholar 

  24. N. S. Nahman and M. E. Guillaume, Deconvolution of Time Domain Waveforms in the Presence of Noise, NBS Technical Note 1047, National Bureau of Standards, Washington, DC (1981).

    Google Scholar 

  25. E. Plies and J. Otto, in: Scanning Electron Microscopy 1985/ IV, SEM, Inc., AMF O’Hare, IL, pp. 1491–500 (1985).

    Google Scholar 

  26. E. Plies and M. Schweizer, Microelectron. Eng. 7, 183 (1987).

    Article  Google Scholar 

  27. S. M. Riad, Proc. IEEE 74, 82 (1986).

    Article  Google Scholar 

  28. K. Nakamae, H. Fujioka, and K. Ura, J. Phys. E 21, 913 (1988).

    Article  ADS  Google Scholar 

  29. H.-D. Brust and F. Fox, Microelectron. Eng. 2, 299 (1985).

    Article  Google Scholar 

  30. H.-D. Brust and W. Kern, Microelectron. Eng. 12, 433 (1990).

    Article  Google Scholar 

  31. M. Brunner, R. Schmitt, D. Winkler, and B. Lischke, Microelectron. Eng. 9, 405 (1989).

    Article  Google Scholar 

  32. R. Schmitt, D. Winkler, M. Brunner, and J. M. Dortu, Microelectron. Eng. 12, 279 (1990).

    Article  Google Scholar 

  33. P. G. May, J.-M. Halbout, and G. L.-T. Chiu, IEEE J. Quantum Electron. QE-24, 234 (1988).

    Article  ADS  Google Scholar 

  34. C. A. Sanford and N. C MacDonald, J. Vac. Sci. Technol B 7, 1903 (1989).

    Article  Google Scholar 

  35. O. Bostanjoglo and F. Heinricht, J. Phys. E 20, 1491 (1987).

    Article  ADS  Google Scholar 

  36. G. C. P. van Gorkom and A. M. E. Hoeberechts, J. Vac. Sci. Technol. A 5, 1544 (1987).

    Article  ADS  Google Scholar 

  37. K. Ura, H. Fujioka, T. Saito, and N. Morimura, J. Electron. Microsc. 27, 311 (1978).

    Google Scholar 

  38. O. I. Szentesi, J. Phys. E 5, 563 (1972).

    Article  ADS  Google Scholar 

  39. R. Schief and M. Steiner, Optik 3, 264 (1973).

    Google Scholar 

  40. L. Kotorman, Scanning Electron Microscopy 1980JIV, SEM, Inc., AMF O’Hare, IL, pp. 77–84 (1980).

    Google Scholar 

  41. E. Plies in Proceedings, Tenth International Congress on Electron Microscopy, vol. 1, Hamburg, pp. 319–20 (1982).

    Google Scholar 

  42. M. Troyon, Microelectron. Eng. 6, 105 (1987).

    Article  Google Scholar 

  43. L. C. Oldfield, J. Phys. E 9, 455 (1976).

    Article  ADS  Google Scholar 

  44. D. R. Hamilton, J. K. Knipp, and J. K. H. Kuper, Klystrons and Microwave Triodes, McGraw-Hill, New York, pp. 210–47 (1948).

    Google Scholar 

  45. E. W. Ernst and H. Von Foerster, J. Appl. Phys. 25, 674 (1954).

    Article  ADS  Google Scholar 

  46. K. Ura and N. Morimura, J. Vac. Sci. Technol. 10, 948 (1973).

    Article  ADS  Google Scholar 

  47. T. Hosokawa, H. Fujioka, and K. Ura, Rev. Sci. Instr. 49, 624 (1978).

    Article  ADS  Google Scholar 

  48. H. Fujioka and K. Ura, Scanning 5, 3 (1983).

    Article  Google Scholar 

  49. B. Lischke, E. Plies, and R. Schmitt, in: Scanning Electron Microscopy 1983J11, SEM, Inc., AMF O’Hare, IL, pp. 1177–85 (1983).

    Google Scholar 

  50. N. Morimura and K. Ura, Trans. Inst. Electron, and Commun. Eng. Jpn. 56-B, 208 (1973).

    Google Scholar 

  51. J. T. L. Thong, B. C. Breton, and W. C. Nixon, J. Vac. Sci. Technol. B 8, 2048 (1990).

    Article  Google Scholar 

  52. A. J. Gonzales and M. W. Powell, in: Tech. Digest of the IEDM, IEEE, New York, pp. 119–22 (1975).

    Google Scholar 

  53. A. Gopinath and M. S. Hill, J. Phys. E 10, 229 (1977).

    Article  ADS  Google Scholar 

  54. A. Recknagel, Z Phys. 111, 61 (1938).

    Article  ADS  Google Scholar 

  55. H. G. Rudenberg, J. Appl. Phys. 116, 279 (1945).

    Article  ADS  Google Scholar 

  56. E. Menzel and E. Kubalek, in: Scanning Electron Microscopy 1979/I, SEM, Inc., AMF O’Hare, IL, pp. 305–17 (1979).

    Google Scholar 

  57. L. R. Bloom and H. M. Von Foerster, Rev. Sci. Instr. 25, 649 (1954).

    Article  ADS  Google Scholar 

  58. K. Ura, H. Fujioka, and T. Hosokawa, in: Scanning Electron Microscopy 1978/I, SEM, Inc., AMF O’Hare, IL, pp. 747–54 (1978).

    Google Scholar 

  59. J. E. Day, in: Advances in Electronics and Electron Physics, vol. 10 (L. Marton and C. Marton, eds), Academic Press, New York, pp. 239–99 (1958).

    Google Scholar 

  60. G. Y. Robinson, Rev. Sci. Instr. 42, 251 (1971).

    Article  ADS  Google Scholar 

  61. M. S. Hill and A. Gopinath, in: Scanning Electron Microscopy 1973/1I, IITRI, Chicago, pp. 197–204 (1973).

    Google Scholar 

  62. P. R. Thomas, K. G. Gopinathan, A. Gopinath, and A. R. Owens, in: Scanning Electron Microscopy 1976/I, IITRI, Chicago, pp. 609–15 (1976).

    Google Scholar 

  63. I. Yamada and T. Takagi, IEEE Trans. Electron Devices ED-19, 204 (1972).

    Article  Google Scholar 

  64. H. P. Feuerbaum and J. Otto, J. Phys. E 11, 529 (1978).

    Article  ADS  Google Scholar 

  65. K. Ozaki, A. Ito, Y. Goto, Y. Furukawa, and T. Inagaki, J. Vac. Sci. Technol. B 5, 84 (1987).

    Article  Google Scholar 

  66. J. Fehr, W. Reiners, L. J. Balk, E. Kubalek, D. Köther, and I. Wolff, Microelectron. Eng. 12,221 (1990).

    Article  Google Scholar 

  67. E. Hieke, G. Meusburger, and H. Alter, in: Scanning Electron Microscopy 1977/1, IITRI, Chicago, pp. 219–24 (1977).

    Google Scholar 

  68. H. Rose and J. Zach, in: Proceedings, Third Pfefferkorn Conference — Electron Optical Systems for Microscopy, Microanalysis, and Microlithography (J. J. Hren, F. A. Lenz, E. Munro, and P. B. Sewell, eds.), SEM, Inc., Chicago, pp. 127–36 (1984).

    Google Scholar 

  69. J. Frosien and E. Plies, Microelectron. Eng. 7, 163 (1987).

    Article  Google Scholar 

  70. L. H. Lin and H. L. Beauchamp, J. Vac. Sci. Technol. 10, 987 (1973).

    Article  ADS  Google Scholar 

  71. J. A. Lange, J. Vac. Sci. Technol. B 6, 1963 (1988).

    Article  ADS  Google Scholar 

  72. H. Fujioka, K. Nakamae, and K. Ura, IEEE J. Solid-State Circuits SC-15, 177 (1980).

    Article  Google Scholar 

  73. G. Chiu, J.-M. Halbout, and P. May, J. Vac. Sci. Technol. B 6, 1814 (1988).

    Article  Google Scholar 

  74. H. Fujioka, K. Nakamae, and K. Ura, J. Phys. E 17, 198 (1984).

    Article  ADS  Google Scholar 

  75. T. Otsuji and N. Narumi, IEEE J. Solid-State Circuits SC-24, 1412 (1989).

    Article  Google Scholar 

  76. M. Brunner, D. Winkler, R. Schmitt, and B. Lischke, Scanning 9, 201 (1987).

    Article  Google Scholar 

  77. H. Fujioka, H. Kunizawa, and K. Ura, J. Phys. E 19, 1025 (1986).

    Article  ADS  Google Scholar 

  78. H. Todokoro, S. Yoneda, S. Scitou, and S. Hosoki, in: Electron Microscopy 1986, vol. 1 (T. Imura, S. Maruse, and T. Suzuki, eds.), Jap. Soc. Electron Microsc, Tokyo, pp. 621–22 (1986).

    Google Scholar 

  79. J. T. L. Thong and W. C. Nixon, Meas. Sci. Technol. 1, 337 (1990).

    Article  ADS  Google Scholar 

  80. D. Winkler, R. Schmitt, M. Brunner, and B. Lischke, Scanning 11, 100 (1989).

    Article  Google Scholar 

  81. E. Menzel and E. Kubalek, Scanning 5, 103–22 (1983).

    Article  Google Scholar 

  82. G. Hachenberg and W. Brauer, in: Advances in Electronics and Electron Physics, vol. 11 (L. Marton, ed.), Academic Press, London, pp. 491–9 (1959).

    Google Scholar 

  83. H. Fujioka, K. Nakamae, and K. Ura, J. Phys. D 18, 1019 (1985).

    Article  ADS  Google Scholar 

  84. R. Clauberg, J. Appl. Phys. 62, 1553 (1987).

    Article  ADS  Google Scholar 

  85. Ibid. 62, 4017 (1987).

    Google Scholar 

  86. A. Khursheed, A. R. Dinnis, and P. D. Smart, Microelectron. Eng. 13, 519 (1991).

    Article  Google Scholar 

  87. K. Nakamae, H. Fujioka, and K. Ura, Scanning Microscopy 2, 821 (1988).

    Google Scholar 

  88. K. Nakamae, S. Fujita, H. Fujioka, and K. Ura, J. Electron Microsc. 39, 7 (1990).

    Google Scholar 

  89. R. B. Marcus, A. M. Weiner, J. H. Abeles, and P. S. D. Lin, Appl. Phys. Lett. 49, 357 (1986).

    Article  ADS  Google Scholar 

  90. J. Bokor, A. M. Johnson, R. H. Storz, and W. M. Simpson, Appl. Phys. Lett. 49, 226 (1986).

    Article  ADS  Google Scholar 

  91. W. Mertin, K. D. Herrmann, and E. Kubalek, Microelectron. Eng. 12, 287 (1990).

    Article  Google Scholar 

  92. K. Nakamae, H. Fujioka, and K. Ura, Meas. Sci. Technol. 1, 894 (1990).

    Article  ADS  Google Scholar 

  93. J. T. L. Thong, Meas. Sci. Technol. 3, 827 (1992).

    Article  ADS  Google Scholar 

  94. R. Lauer, in: Advances in Optical and Electron Microscopy, vol. 8 (R. Barer and V. E. Cosslett, eds.), Academic Press, London, pp. 137–206 (1982).

    Google Scholar 

  95. D. W. Tuggle, L. W. Swanson, and M. A. Gesley, J. Vac. Sci. Technol. B 4, 131 (1986).

    Article  Google Scholar 

  96. H. Boersch, Z. Phys. 139, 115 (1954).

    Article  ADS  Google Scholar 

  97. B. Zimmermann, in: Record of the Tenth Symposium on Electron, Ion, and Laser Beam Technology (L. Marton, ed.), San Francisco Press, San Francisco, pp. 297–304 (1969).

    Google Scholar 

  98. A. E. Bell and L. W. Swanson, Phys. Rev. B 19, 3353 (1979).

    Article  ADS  Google Scholar 

  99. R. Clauberg and A. Blacha, J. Appl. Phys. 65, 4095 (1989).

    Article  ADS  Google Scholar 

  100. H. C. Pfeiffer, in: Record of the Eleventh Symposium on Electron, Ion, and Laser Beam Technology (R. F. M. Thornley, ed.), San Francisco Press, San Francisco, pp. 239–46 (1971).

    Google Scholar 

  101. M. Troyon, J. Appl. Phys. 66, 1 (1989).

    Article  ADS  Google Scholar 

  102. T. K. Fowler and W. M. Good, Nucl. Instrum. Methods 7, 245 (1960).

    Article  ADS  Google Scholar 

  103. T. Hosokawa, H. Fujioka, and K. Ura, Trans. Inst. Electron, and Commun. Eng. Jpn. 60-B, 55 (1977).

    Google Scholar 

  104. K. Ura and H. Fujioka, in: Advances in Electronics and Electron Physics, vol. 73 (P. W. Hawkes, ed.), Academic Press, London, pp. 233–317 (1989).

    Google Scholar 

  105. J. T. L. Thong, Meas. Sci Technol. 2, 207 (1991).

    Article  ADS  Google Scholar 

  106. R. Majidi-Ahy and D. M. Bloom, Electron. Lett. 25, 6 (1989).

    Article  ADS  Google Scholar 

  107. R. C. Eden and J. E. Clarke, in: Characterization of Very High Speed Semiconductor Devices and Integrated Circuits, vol. 795 (R. Jain, ed.), SPIE, Washington, pp. 91–97 (1987).

    Google Scholar 

  108. C. J. M. Madden, M. J. W. Rodwell, R. A. Marsland, D. M. Bloom, and Y. C. Pao, Electr. Dev. Lett. 9, 303 (1988).

    Article  ADS  Google Scholar 

  109. Y. Pastol, J.-M. Halbout, P. May, and G. Chiu, Scanning Microscopy 3, 443 (1989).

    Google Scholar 

  110. M. B. Ketchen, D. Grischkowsky, T. C Chen, C.-C. Chi, I. N. Duling III, N. J. Halas, J.-M. Halbout, J. A. Kash, and G. P. Li, Appl. Phys. Lett. 48, 751 (1986).

    Article  ADS  Google Scholar 

Download references

Author information

Author notes

  1. J. T. L. Thong

    Present address: Department of Electrical Engineering, National University of Singapore, Singapore, 0511, Republic of Singapore

Authors and Affiliations

  1. Department of Engineering, Cambridge University, Cambridge, CB2 1PZ, England

    J. T. L. Thong

Authors
  1. J. T. L. Thong
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Cambridge University, Cambridge, England

    John T. L. Thong

Rights and permissions

Reprints and permissions

Copyright information

© 1993 Springer Science+Business Media New York

About this chapter

Cite this chapter

Thong, J.T.L. (1993). High-Speed Techniques. In: Thong, J.T.L. (eds) Electron Beam Testing Technology. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1522-1_7

Download citation

  • DOI: https://doi.org/10.1007/978-1-4899-1522-1_7

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-1524-5

  • Online ISBN: 978-1-4899-1522-1

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation