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Electron Beam Interaction with Specimen

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Electron Beam Testing Technology

Part of the book series: Microdevices ((MDPF))

Abstract

This subject covers a wide scientific field and has a long history—a number of investigations have been reported, and excellent textbooks and review papers have been published. This Chapter restricts the field of coverage to topics that are directly related to EBT, considering both fundamental physical and experimental aspects.

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Authors and Affiliations

  1. Faculty of Engineering, Electron Beam Laboratory, Osaka University, Yamada-Kami, Suita, Osaka 565, Japan

    K. Ura

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  1. K. Ura
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Editors and Affiliations

  1. Cambridge University, Cambridge, England

    John T. L. Thong

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© 1993 Springer Science+Business Media New York

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Ura, K. (1993). Electron Beam Interaction with Specimen. In: Thong, J.T.L. (eds) Electron Beam Testing Technology. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1522-1_5

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  • DOI: https://doi.org/10.1007/978-1-4899-1522-1_5

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-1524-5

  • Online ISBN: 978-1-4899-1522-1

  • eBook Packages: Springer Book Archive

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