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Electron Beam Testing Technology pp 35–125Cite as

Principles and Applications

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Part of the book series: Microdevices ((MDPF))

Abstract

Electron beam testing encompasses a range of activities involving the application of an electron probe to observe the electrical characteristics of a circuit. Historically EBT techniques and instrumentation evolved from the broader field of scanning electron microscopy. One of the earliest phenomena observed in the SEM is voltage contrast, which provided the basis for observing voltages on integrated circuits, an application with which the term electron beam testing has come to be most closely associated. In this role, the electron probe is expected to be noninvasive—that is, not modify the functioning of the circuit. However an electron probe can also be used to influence circuit behavior by injecting a charge or creating electron-hole pairs in semiconductors. This mode of operation can play a role in testing that is complementary to noninvasive observation by providing the means of controlling a circuit.

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  1. J. T. L. Thong

    Present address: Department of Electrical Engineering, National University of Singapore, Singapore, 0511, Republic of Singapore

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Thong, J.T.L. (1993). Principles and Applications. In: Thong, J.T.L. (eds) Electron Beam Testing Technology. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1522-1_3

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