Abstract
This chapter comprises a series of case studies in three diverse industrial environments where EBT is used. Section 11.1 provides a perspective from an IC developer and includes a number of examples where EBT was used for chip verification and failure analysis at various stages of an IC’s life. Because an IC user does not have access to the design information and in attempting to perform failure analysis is faced with the task of working from a rudimentary knowledge of the layout and functioning of a device, different failure analysis strategies involving EBT are adopted (Section 11.2). In the final section (Section 11.3), the application of beam-induced current as a diagnostic technique is described in the context of development and production line support environments.
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Ranasinghe, D.W., Whyte, I.G., Collin, JP., Lukianoff, G.V. (1993). Industrial Case Studies. In: Thong, J.T.L. (eds) Electron Beam Testing Technology. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1522-1_12
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