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Abstract

In an SEM the image is formed in a cathode ray tube synchronized with an electron probe as it scans the surface of an object.(1) The resulting signals are secondary electrons, backscattered electrons, characteristic X rays, Auger electrons, and photons of various energies.

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© 1994 Springer Science+Business Media New York

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Rochow, T.G., Tucker, P.A. (1994). Scanning Electron Microscopy and Compositional Analysis. In: Introduction to Microscopy by Means of Light, Electrons, X Rays, or Acoustics. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1513-9_15

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  • DOI: https://doi.org/10.1007/978-1-4899-1513-9_15

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-1515-3

  • Online ISBN: 978-1-4899-1513-9

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