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Scanning Probe Microscopy

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Microanalysis of Solids

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Abstract

Several techniques have been developed over the past decade using near-field effects to obtain high-resolution microscopic images and surface microanalysis. These techniques are referred to as scanning probe microscopies (SPM). In each of these microscopies, a sharpened probe is used to measure a specific interaction between the probe and the surface of interest. The instrument which began this new and expanding field of microscopy is the scanning tunneling microscope (STM) invented in 1981 by Binnig, Rohrer, and coworkers (1982a–c). The STM measures the electronic interaction between a conductive or semiconductive probe and sample which allows the direct imaging of geometric and electronic surface structure with atomic resolution. Several reviews of the STM literature have been published (Golovchenko, 1986; Hansma and Tersoff, 1987; Binnig and Rohrer, 1987; Kuk and Silverman, 1989; Demuth et al., 1988; Griffith and Kochanski, 1990).

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References

  • Abraham, D. W., Williams, C. C., and Wickramasinghe, H. K. (1988). Appl. Phys. Lett. 53 (15), 1447.

    Google Scholar 

  • Akama, Y., Nishimura, E., Sakai, A., and Murakami, H. (1990). J. Vac. Sci. Technol. A 8 (1), 429.

    Article  CAS  Google Scholar 

  • Akamine, S., Barrett, R. C., and Quate, C. F. (1990). Appl. Phys. Lett. 57 (3), 316.

    Article  CAS  Google Scholar 

  • Albrecht, T. R. (1989). Ph.D. dissertation, G. L. No. 4529, Stanford University.

    Google Scholar 

  • Alexander, S., Hellemans, L., Marti, O., Schneir, J., Elings, V., Hansma, P. K., Longmire, M., and Gurley, J. (1989). J. Appl. Phys. 65, 164.

    Article  CAS  Google Scholar 

  • Anbar, M., and Aberth, W. H. (1974). Anal. Chem. 46, 59.

    Article  Google Scholar 

  • Atkins, P. W. (1978). Physical Chemistry, Oxford University Press, London.

    Google Scholar 

  • Baratoff, A. (1989). Physica (Utrecht) 127B, 143.

    Google Scholar 

  • Baro, A. M., Binnig, G., Gerber, C., Stoll, E., Baratoff, A., and Salvan, F. (1984). Phys. Rev. Lett. 52, 1304.

    Article  CAS  Google Scholar 

  • Biegelsen, D. K., Ponce, F. A., Tramontana, J. C., and Koch, S. M. (1987). Appl. Phys. Lett. 50 (11), 696.

    Article  CAS  Google Scholar 

  • Biegelsen, D. K., Ponce, F. A., and Tramontana, J. C. (1989). Appl. Phys. Lett. 54 (13), 1223.

    Google Scholar 

  • Binnig, G. (1987). Phys. Scr. T19.

    Google Scholar 

  • Binnig, G., and Rohrer, H. (1982). Hell,. Phys. 55, 726.

    CAS  Google Scholar 

  • Binnig, G., and Rohrer, H. (1987). Rev. Mod. Phys. 59, 615.

    Article  CAS  Google Scholar 

  • Binnig, G., and Smith, D. P. E. (1986). Rev. Sci. Instrum. 57(8).

    Google Scholar 

  • Binnig, G., Rohrer, H., Gerber, C., and Weibel, E. (1982a). Appl. Phys. Lett. 40, 178.

    Article  CAS  Google Scholar 

  • Binnig, G., Rohrer, H., Gerber, C., and Weibel, E. (1982b). Physica 109–110B, 2075.

    Google Scholar 

  • Binnig, G., Rohrer, H., Gerber, C., and Weibel, E. (1982c). Phys. Rev. Lett. 49, 57.

    Article  Google Scholar 

  • Binnig, G., Rohrer, H., Gerber, C., and Weibel, E. (1983). Phys. Rev. Lett. 50, 120.

    Article  CAS  Google Scholar 

  • Binnig, G., Quate, C. F., and Gerber, C. (1986). Phys. Rev. Lett. 56 (9), 930.

    Article  PubMed  Google Scholar 

  • Betzig, E., and Chichester, R. J. (1994). Science. to be published.

    Google Scholar 

  • Betzig, E., Isaacson, M., and Lewis, A. (1987). Appl. Phys. Lett. 51 (25), 2088.

    Article  Google Scholar 

  • Bryant, P. J., Kim, H. S., Zheng, Y. C., and Yang, R. (1987). Rev. Sci. Instrum. 58, 1115.

    Article  Google Scholar 

  • Bugg, C. D., and King, P. J. (1988). J. Phys. E 21, 147.

    Article  CAS  Google Scholar 

  • Burnham, N. A., and Colton, R. J. (1990). Scanning Tunneling Microscopy: Theory and Application, VCH Publishers, New York.

    Google Scholar 

  • Chiang, S., and Wilson, R. J. (1986). IBM J. Res. Dev. 30, 515.

    Article  CAS  Google Scholar 

  • Cohen, M. H., Falicov, L. M., and Phillips, J. C. (1962). Phys. Rev. Lett. 8 (8), 316.

    Article  Google Scholar 

  • Demuth, J. E., Koehler, U. K., and Hamers, R. J. (1988). J. Microsc. (Oxford) 152, 299.

    Article  CAS  Google Scholar 

  • Duke, C. B. (1969). Tunneling in Solids, Solid State Physics, Suppl. 10, Academic Press, New York.

    Google Scholar 

  • Durig, U., Pohl, D. W., and Rohner, F. (1986a). J. Appl. Phys. 59 (10), 3318.

    Article  Google Scholar 

  • Durig, U., Pohl, D. W., and Rohner, F. (1986b). IBM J. Res. Dey.

    Google Scholar 

  • Erlandsson, R., McClelland, G. M., Mate, C. M., and Chiang, S. (1988). J. Vac. Sci. Technol. A 6 (2), 266.

    Article  CAS  Google Scholar 

  • Feuchtwang, T. E. (1974a). Phys. Rev. B10 (10), 4121.

    Article  Google Scholar 

  • Feuchtwang, T. E. (1974b). Phys. Rev. B10 (10), 4135.

    Article  Google Scholar 

  • Feuchtwang, T. E. (1975). Phys. Rev. B12 (9), 3979.

    Article  Google Scholar 

  • Feuchtwang, T. E. (1976). Phys. Rev. B13 (2), 517.

    Google Scholar 

  • Feuchtwang, T. E. (1979). Phys. Rev. B20 (2), 430.

    Article  CAS  Google Scholar 

  • Fowler, R. H., and Nordheim, L. (1928). Proc. R. Soc. London A119, 173.

    Article  CAS  Google Scholar 

  • Garcia, N., Ocal, C., and Flores, F. (1983). Phys. Rev. Lett. 50 (25), 2002.

    Article  CAS  Google Scholar 

  • Germano, C. P., (1959). IRE Trans. Audio July-Aug.

    Google Scholar 

  • Goddenhenrich, T., Lemke, H., Hartmann, U., and Heiden, C. (1990). J. Vac. Sci. Technol. A 8, 383.

    Article  Google Scholar 

  • Golovchenko, J. A. (1986). Science 232, 48.

    Article  PubMed  CAS  Google Scholar 

  • Griffith, J. E., and Kochanski, G. P. (1990). Annu. Rev. Mater Sci. 20, 219.

    Article  CAS  Google Scholar 

  • Grutter, P., Meyer, E., Heinzelmann, H., Rosenthaler, L., Hidber, H. R., and Guntherodt, H. J. (1988). J. Vac. Sci. Technol. A6 (2), 279.

    Article  Google Scholar 

  • Hansma, P. K., and Tersoff, J. (1987). J. Appl. Phys. 61 (2), R1.

    Article  CAS  Google Scholar 

  • Harrison, W. A. (1979). Surf. Sci. 55, 1.

    Article  Google Scholar 

  • Hobbs, P. C. D., Abraham, D. W., and Wickramasinghe, H. K. (1989). Appl. Phys. Lett. 55, 2357.

    Article  Google Scholar 

  • Israelachvili, J. N. (1985). Intermolecular and Surface Forces, Academic Press, New York.

    Google Scholar 

  • Joyce, S. A., and Houston, J. E. (1991). Rev. Sci. Instrum. 62 (3), 710.

    Article  CAS  Google Scholar 

  • Kuk, Y., and Silverman, P. J. (1986). Appl. Phys. Lett. 48 (23), 1597.

    Article  CAS  Google Scholar 

  • Kuk, Y., and Silverman, P. K. (1989). Rev. Sci. Instrum. 60(2).

    Google Scholar 

  • Lang, N. D. (1985). Phys. Rev. Lett. 55, 230.

    Article  PubMed  CAS  Google Scholar 

  • Lang, N. D. (1986). Phys. Rev. Lett. 56, 1164.

    Article  PubMed  Google Scholar 

  • Leipold, W. C., and Feuchtwang, T. E. (1974). Phys. Rev. B10 (6), 2195.

    Article  CAS  Google Scholar 

  • Lemke, H., Goddenhenrich, T., Bochem, H. P., Hartmann, U., and Heiden, C. (1990). Rev. Sci. Instrum. 61 (10), 2538.

    Article  CAS  Google Scholar 

  • Little, R. W. (1973). Elasticity, Prentice-Hall, Englewood Cliffs, N.J.

    Google Scholar 

  • McClelland, G. M., Erlandsson, R., and Chiang, S. (1987). In Review of Progress in Quantitative Nondestructive Evaluation (D. O. Thompson and D. E. Chimenti, eds.), Vol. 6B, Plenum Press, New York, p. 307.

    Google Scholar 

  • McCord, M. A., and Pease, R. F. (1987). J. Vac. Sci. Technol. Jan.-Feb.

    Google Scholar 

  • Mamin, H. J., Rugar, D., Stern, J. E., Terris, B. D., and Lambert, S. E. (1988). Appl. Phys. Lett. 53, 1563.

    Article  Google Scholar 

  • Martin, Y., and Wickramasinghe, H. K. (1987). Appl. Phys. Lett. 50, 1455.

    Article  Google Scholar 

  • Martin, Y., Williams, C. C., and Wickramasinghe, H. K. (1987). J. Appl. Phys. 61 (10), 4723.

    Article  CAS  Google Scholar 

  • Martin, Y., Abraham, D. W., and Wickramasinghe, H. K. (1988). Appl. Phys. Lett. 52, 1103.

    Article  Google Scholar 

  • Mate, C. M., McClelland, G. M., Erlandsson, R., and Chiang, S. (1987). Phys. Rev. Lett. 59, 1942.

    Article  PubMed  CAS  Google Scholar 

  • Matey, J. R., and Blanc, J. (1985). J. Appl. Phys. 47, 1437.

    Article  Google Scholar 

  • Meyer, G., and Amer, N. M. (1988a). Appl. Phys. Lett. 53 (12), 1045.

    Google Scholar 

  • Meyer, G., and Amer, N. M. (1988b). Appl. Phys. Lett. 53 (12), 2400.

    Google Scholar 

  • Miller, G. L., Griffith, J. E., Wagner, E. R., and Grigg, D. A. (1991). Rev. Sci. Instrum. 62 (3), 705.

    Article  CAS  Google Scholar 

  • Muller, E. W., and Tsong, T. T. (1969). Field Ion Microscopy, American Elsevier, New York.

    Google Scholar 

  • Musselman, I. H., and Russell, P. E. (1990). J. Vac. Sci. Technol. A8, 3558.

    Article  Google Scholar 

  • Pethica, J. B., and Sutton, A. P. (1988). J. Vac. Sci. Technol. A 6 (4), 249.

    Article  Google Scholar 

  • Phillips, C. L., and Nagle, H. T., Jr. (1984). Digital Control System Analysis and Design, Prentice-Hall, Englewood Cliffs, N.J.

    Google Scholar 

  • Reiss, G., Schneider, F., Vancea, J., and Hoffmann, H. (1990). Appl. Phys. Lett. 57 (9), 867.

    Article  CAS  Google Scholar 

  • Rugar, D., Mamin, H. J., and Guethner, P. (1989). Appl. Phys. Lett. 55, 2588.

    Article  CAS  Google Scholar 

  • Rugar, D., Mamin, H. J., Guethner, P., Lambert, S. E., Stern, J. E., and McFadyen, I. (1990). J. Appl. Phys. 68 (3), 1169.

    Article  CAS  Google Scholar 

  • Saenz, J. J., Garcia, N., Grutter, P., Meyer, E., Heinzelmann, H., Wiesendanger, R., Rosenthaler, L., and Hidber, H. R. (1987). J. Appl. Phys. 62 (10), 4293.

    Article  Google Scholar 

  • Saenz, J. J., Garcia, N., and Slonczewski, J. C. (1988). Appl. Phys. Lett. 53 (15), 1449.

    Google Scholar 

  • Sand, D. (1991). Scanning Force Microscopy: With Applications to Electric, Magnetic, and Atomic Forces, Oxford University Press, London.

    Google Scholar 

  • Sand, D., Iams, D., and Weissenberger, V. (1988). Opt. Lett. 13, 1057.

    Article  Google Scholar 

  • Schonenberg, C., Alvarado, S. F., Lambert, S. E., and Sanders, I. L. (1990).1 Appl. Phys. 67(12), 7278.

    Google Scholar 

  • Simmons, J. G. (1963). J. Appl. Phys. 34, 1793.

    Article  Google Scholar 

  • Smith, D. P. E., and Binnig, G. (1986). Rev. Sci. Instrum. 57(10).

    Google Scholar 

  • Spindt, C. A., Brodie, I., Humphrey, L., and Westerberg, E. R. (1976). J. Appl. Phys. 47, 5248.

    Article  CAS  Google Scholar 

  • Stern, J. E., Terris, B. D., Mamin, H. J., and Rugar, D. (1988). Appl. Phys. Lett. 53, 2717.

    Article  Google Scholar 

  • Stoll, E., Baratoff, A., Selloni, A., and Camevalli, P. (1984). J. Phys. C17, 3073.

    CAS  Google Scholar 

  • Tersoff, J., and Hamann, D. R. (1983). Phys. Rev. Lett. 50, 25.

    Google Scholar 

  • Tersoff, J., and Hamann, D. R. (1985). Phys. Rev. B31, 2.

    Google Scholar 

  • Vasile, M. J., and Harriott, L. R. (1989). J. Vac. Sci. Technol. B7 (6), 1954.

    Google Scholar 

  • Vasile, M. J., Grigg, D. A., Griffith, J. E., Russell, P. E., and Fitzgerald, E. A. (1991). Rev. Sci. Instrum. 62, 2167.

    Article  Google Scholar 

  • Williams, C. C., Hough, W. P., and Rishton, S. A. (1989). Appl. Phys. Lett. 55 (2), 203.

    Article  Google Scholar 

  • Ximen, H., and Russell, P. E. (1992). Ultramicroscopy 42–44, 1526–1532.

    Article  Google Scholar 

  • Young, R. (1966). Rev. Sci. Instrum. 37, 275.

    Article  CAS  Google Scholar 

  • Young, R. (1971). Phys. Today 24, 42.

    Article  Google Scholar 

  • Young, R., Ward, J., and Scire, F. (1971). Phys. Rev. Lett. 27, 922.

    Article  CAS  Google Scholar 

  • Young, R., Ward, J., and Scire, F. (1972). Rev. Sci. Instrum. 43, 999.

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina, 27695, USA

    D. A. Grigg & P. E. Russell

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  1. D. A. Grigg
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  2. P. E. Russell
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Editors and Affiliations

  1. EMTECH, Toronto, Ontario, Canada

    B. G. Yacobi

  2. Department of Materials, Imperial College, SW7 2BP, London, England

    D. B. Holt

  3. National Renewable Energy Laboratory, 80401, Golden, Colorado, USA

    L. L. Kazmerski

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Grigg, D.A., Russell, P.E. (1994). Scanning Probe Microscopy. In: Yacobi, B.G., Holt, D.B., Kazmerski, L.L. (eds) Microanalysis of Solids. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1492-7_14

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  • DOI: https://doi.org/10.1007/978-1-4899-1492-7_14

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