Abstract
The PLD technique possesses many unique properties that have led, up to now, to fabrication of excellent quality films of a variety of materials. In these cases the great advantage of the method is strongly connected to its stoichiometric target reproduction. Recently PLD has attracted much effort in the deposition of Diamond Like Carbon (DLC) films. The growing interest in DLC is essentially due to the peculiar properties of this material which make it a very attractive choice in the microtechnology field.
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Martellucci, S., Richetta, M., Tebano, A., Spena, A. (1997). Pulsed Laser Deposition: Perspectives as a Micro-Optics Fabrication Technique. In: Martellucci, S., Chester, A.N. (eds) Diffractive Optics and Optical Microsystems. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1474-3_15
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