Abstract
Microelectronics and Integrated Optics (10) share most of the microfabrication technologies, in particular micropatterning. Fabrication processes of 10 devices, however, are subject to specific requirements, imposed by the nature of light confinement, which are often tighter than the ones usually adopted in microelectronics.
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Righini, G.C., Forastiere, M.A. (1997). Microfabrication Technologies for Integrated Optical Devices. In: Martellucci, S., Chester, A.N. (eds) Diffractive Optics and Optical Microsystems. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1474-3_10
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DOI: https://doi.org/10.1007/978-1-4899-1474-3_10
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