Quantification of Data from Homogeneous Materials

  • Graham C. Smith
Part of the Updates in Applied Physics and Electrical Technology book series (UAPE)

Abstract

Quantification of data from XPS or AES is a type of data processing and could have been included in the previous chapter. However, it can be a complex task and is of such central importance in surface analysis that a separate chapter is required for its discussion. The subject is reviewed in depth by Seah (1990). Currently, there is no one single satisfactory method of quantification which gives reliable results in all cases. Nevertheless considerable progress can be made using a combination of the theoretical results and experimental data that are presented below.

Keywords

Atomic Number Matrix Factor Bulk Composition Sensitivity Factor Auger Spectrum 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Copyright information

© Springer Science+Business Media New York 1994

Authors and Affiliations

  • Graham C. Smith
    • 1
  1. 1.Shell Research Ltd.ChesterEngland

Personalised recommendations