Quantification of Data from Homogeneous Materials
Quantification of data from XPS or AES is a type of data processing and could have been included in the previous chapter. However, it can be a complex task and is of such central importance in surface analysis that a separate chapter is required for its discussion. The subject is reviewed in depth by Seah (1990). Currently, there is no one single satisfactory method of quantification which gives reliable results in all cases. Nevertheless considerable progress can be made using a combination of the theoretical results and experimental data that are presented below.
KeywordsAtomic Number Matrix Factor Bulk Composition Sensitivity Factor Auger Spectrum
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