Simple Metal-on-Plastics Patterning by Pulsed Electron Beam in Soft Vacuum
Direct patterning of polyimide images with a built-on-metal layer can be accomplished by electron beam exposures of doped polyamic acid films, followed by wet development in NMP and subsequent heating and curing to polyimide films. During curing at 300°C the metal salts converted to metal and migrated to the top surface of polyimide films. Additional electron beam exposures of images assisted metal film formation. Auger electron and Rutherfold backscattering spectroscopic analyses were carried out to confirm metal migration to the surface. Silver nitrate, gold mercaptide and cupric chloride were used as dopants in polyamic acid films.
KeywordsSilver Nitrate Rutherford Backscatter Spectroscopy Direct Patterning Polyimide Film Pulse Electron Beam
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