UV Laser-Induced Metallization of Polyimide from Electroplating Solution

  • J. Zahavi
  • M. Rotel
  • D. Katz
  • S. Levine


The feasibility of direct deposition of gold from an organic gold plating solution (1.0g HAuCl4 in 50ml ethanol) on “Kapton H” polyimide substrates was demonstrated. Specimens immersed in the solution were exposed to UV laser irradiation at 24nsec pulse duration and 193nm wavelength.


Gold Layer Bubble Diameter Bubble Surface Laser Repetition Rate Gold Solution 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    R.F. Karlicek and V.M. Donnelly, J. Appl. Phys. 58(2). 1084–1090 (1980).Google Scholar
  2. 2.
    Y.C. Kiang, J.R. Moulic and J. Zahavi, IBM Technical Disclosure Bulletin, 26, No. 1, 327 (June 1983).Google Scholar
  3. 3.
    J. Zahavi, S. Tamir and M. Halliwell, Mat. Research Soc. Symp. Proceeding, 7, 387–393 (1986).CrossRefGoogle Scholar
  4. 4.
    J. Zahavi, S. Tamir and M. Halliwell, Plating Surface Finishing, 47-64 (1986).Google Scholar
  5. 5.
    J. Zahavi, S. Tamir and M. Halliwell, Laser gold deposition on polyimide, Proceedings Interfinish 1984, 11th World Congress on Metal Finishing, Jerusalem, Israel, 497, (October 21–26, 1984). Published by International Ltd., 10 Rothschild Blvd., 65121 Tel-Aviv, Israel.Google Scholar
  6. 6.
    V. Srinivasan, M.A. Smrtic and S.V. Babu, J. Appl. Phys. 59(11). 3861–3867 (1986).CrossRefGoogle Scholar
  7. 7.
    R. Srinivasan and B. Braren, J. Polym. Sci., 22, 2601–2609 (1984).Google Scholar
  8. 8.
    P.E. Dyer and J. Sidhu, J. Appl. Phys. 57(4), 1420, (1985).CrossRefGoogle Scholar
  9. 9.
    H.B. Brom, Y. Tomkiewicz, A. Aviram, A. Broers and B. Sunners, Solid State Commun. 35, 135 (1980).CrossRefGoogle Scholar
  10. 10.
    A. Burger, E. Fitzer, M. Heym, and B. Termiesch, Carbon, 13(3). 149–157 (1973).CrossRefGoogle Scholar
  11. 11.
    D. Bruck, Polymer (London) 6, 319 (1965).CrossRefGoogle Scholar
  12. 12.
    A. Felske and J.W. Plieth, J. Opt. Soc. Amer. B3, 815 (1986).Google Scholar
  13. 13.
    D.V. Podlesnik, H.H. Gilgen, A.E. Willmer and R.M. Osgood, J. Opt. Soc. Amer., B3, No. 5, (May 1986).Google Scholar
  14. 14.
    S. Mazur and S. Reich, J. Phys. Chem., 90, 1365 (1986).CrossRefGoogle Scholar
  15. 15.
    S. Mazur, P.S. Lugg and C. Yarnitzky, J. Electrochem. Soc, 134(2), 346 (1987).CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 1989

Authors and Affiliations

  • J. Zahavi
    • 1
  • M. Rotel
    • 1
  • D. Katz
    • 2
  • S. Levine
    • 3
  1. 1.Israel Institute of MetalsTechnionHaifaIsrael
  2. 2.Department of Materials EngineeringTechnionHaifaIsrael
  3. 3.I. B. M. CorporationBromontCanada

Personalised recommendations