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Characterization of Surface Modifications during Metallization of Polyetherimide

  • Michael C. Burrell
  • Bradley R. Karas
  • Donald F. Foust
  • William V. Dumas
  • Edward J. Lamby
  • Willard T. Grubb
  • John J. Chera

Abstract

The chemical and compositional modifications of a polyetherimide surface during metallization processes have been monitored using x-ray photoelectron spectroscopy (XPS). The following aspects will be discussed: 1) detection of contaminants on the polymer surface and the effectiveness of various cleaning agents; 2) determination of the degree of imide hydrolysis; 3) quantification of the coverages of metallization catalysts using Rutherford backscattering spectrometry (RBS) as a calibration method; 4) measurement of the changes in catalyst composition (colloidal Pd/Sn) during sensitization and acceleration steps; and 5) verification of the cause of leakage current between isolated conductor runs.

Keywords

Rutherford Backscattering Spectrometry Metallization Catalyst Electroless Copper Rutherford Backscattering Spectrometry Spectrum Metallization Process 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1989

Authors and Affiliations

  • Michael C. Burrell
    • 1
  • Bradley R. Karas
    • 1
  • Donald F. Foust
    • 1
  • William V. Dumas
    • 1
  • Edward J. Lamby
    • 1
  • Willard T. Grubb
    • 1
  • John J. Chera
    • 1
  1. 1.GE Corporate Research and DevelopmentSchenectadyUSA

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