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A Static SIMS Study of Interfaces between Evaporated Metal Films and Polyimides

  • W. J. van Ooij
  • R. H. G. Brinkhuis
  • J. M. Park

Abstract

Static SIMS has been used to characterize the surfaces of a variety of commercial polyimides and of the interfaces between a polyimide of the PMDA-ODA type and evaporated films of copper and chromium. The commercial materials were all contaminated with organic and inorganic materials: the most common one is a free anhydride. The spectra obtained from the metal-PI interfaces are initially different for Cu and Cr but become identical after a post-deposition annealing treatment. A possible mechanism for the metal-polymer interaction based on the SIMS results is presented.

Keywords

Full Scale Metal Film Primary Beam Peel Strength Polyamic Acid 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    N.J. Chou, D.W. Dong, J. Kim and A.C. Liu, J. Electrochem. Soc, 131, 2335 (1984).CrossRefGoogle Scholar
  2. 2.
    N.J. Chou and C.H. Tang, J. Vac. Soc. Technol., A2, 751 (1984).CrossRefGoogle Scholar
  3. 3.
    P.S. Ho, P.O. Hahn, J.W. Bartha, G.W. Rubloff, F.K. Legoues and B.D. Silverman, J. Vac. Sci. Technol., A3. 739 (1985).Google Scholar
  4. 4.
    Y.-H. Kim, G.F. Walker, J. Kim and J.M. Park, J. Adhesion Sci. Technol., 1, 331 (1987).CrossRefGoogle Scholar
  5. 5.
    M. Grunze, W. Unertl, S. Gnanarajan and J. French, MRS Symp. Proc, 108, 189 (1988).CrossRefGoogle Scholar
  6. 6.
    S.C. Freilich and F.C. Ohuchi, Polymer, 1909 (1987).Google Scholar
  7. 7.
    J.W. Bartha, P.O. Hahn, F. Legoues and P.S. Ho, J. Vac. Sci. Technol., A3, 1390 (1985).Google Scholar
  8. 8.
    W.J. van Ooij and R.H.G. Brinkhuis, Surf. Interface Anal., 11, 430 (1988).CrossRefGoogle Scholar
  9. 9.
    D. Briggs, Org. Mass Spectrom., 22, 91 (1987).CrossRefGoogle Scholar
  10. 10.
    A. Brown and J.C. Vickerman, Surf. Interface Anal., 8, 75 (1986).CrossRefGoogle Scholar
  11. 11.
    W.J. van Ooij, R.H.G. Brinkhuis and J.G. Newman, in: “Secondary Ion Mass Spectrometry, SIMS VI”, A. Benninghoven, A.M. Huber and H.W. Werner, editors, p. 671, John Wiley and Sons, New York, 1988.Google Scholar
  12. 12.
    W.J. van Ooij and R.S. Michael, in preparation for publication in Surf. Interface Anal.Google Scholar
  13. 13.
    W.J. van Ooij and R.H.G. Brinkhuis, in: “Secondary Ion Mass Spectrometry, SIMS VI”, A. Benninghoven, A.M. Huber and H.W. Werner, editors, p. 635, John Wiley and Sons, New York, 1988.Google Scholar

Copyright information

© Springer Science+Business Media New York 1989

Authors and Affiliations

  • W. J. van Ooij
    • 1
  • R. H. G. Brinkhuis
    • 1
  • J. M. Park
    • 2
  1. 1.Department of ChemistryColorado School of MinesGoldenUSA
  2. 2.IBM CorporationEndicottUSA

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