Uncertainty Analysis of Analytic Oxidation Models

  • Zhi-Min Ling
  • Luc H. Dupas
  • Kristin M. De Meyer


The purpose of this paper is to indicate the parameters uncertainty in most of the proposed analytical oxidation models [1]–[6]. At first, the ε -indifference range, i.e. is defined. Then the determination of the parameters uncertainty is converted into the determination of ε -indifference range. The methods are introduced to determine this ε -indifference range, and afterwards also the parameter uncertainty. The correlation matrices of the paramet ers for each model are given in this paper. The results of this paper show that most of the analytical oxidation model’s parameters are interdependent within a widely used data fitting and parameter extraction range. Most of the extracted parameters for these proposed oxidation models [1]–[6] show a quite large uncertainty. Therefore, some physical mechanisms of oxidation which were concluded from or proven by the data fitting only could be questioned and debated.


Parameter Uncertainty Oxide Thickness Internal Electric Field Oxidation Model Ellipsoid Approximation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media New York 1988

Authors and Affiliations

  • Zhi-Min Ling
    • 1
  • Luc H. Dupas
    • 1
  • Kristin M. De Meyer
    • 1
    • 2
  1. 1.IMEC v.z.w.Leuven, HeverleeBelgium
  2. 2.Katholieke universiteitLeuvenBelgium

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