Preoxidation Surface Treatments in Thermal Oxidation of Silicon

  • Jerzy Ruzyllo


The role of preoxidation surface treatments in thermal oxidation of silicon is discussed. The nature of various treatments, and the effect they may have on the growth of an oxide, its structure and composition as well as electrical properties is evaluated. A systematic approach to the implementation of preoxidation treatments carried out outside the process chamber as well as in situ is presented for the case of the thermal growth of gate oxides. The possibilities of modifying the condition of the silicon surface through the preoxidation treatments are discussed.


Thermal Oxidation Silicon Surface Thermal Growth Thermal Oxidation Process Rapid Thermal Oxidation 
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Copyright information

© Springer Science+Business Media New York 1988

Authors and Affiliations

  • Jerzy Ruzyllo
    • 1
  1. 1.Center for Electronic Materials and Devices Department of Electrical EngineeringThe Pennsylvania State UniversityUniversity ParkUSA

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