Low Temperature Conductance of Si-MOS Devices after Hot Carrier Degradation

  • M. Bollu
  • F. Koch

Abstract

We consider the temperature dependence of hot carrier induced degradation effects in MOS devices. It is shown that the degradation is caused by interface states near drain with an energy dependent density strongly peaked at the conduction band edge. The degradation behaviour with increasing stress time is investigated up to a defect density of 6 × 1012/cm2. Below l0 K, the conductance gate voltage characteristic of a degraded device shows evidence for quantum effects in the form of a resonant tunneling process which causes a peak-to-valley conductivity change by many orders of magnitude.

Keywords

Interface State Resonant Tunneling Conduction Band Edge Stress Time Oxide Charge 
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Copyright information

© Springer Science+Business Media New York 1988

Authors and Affiliations

  • M. Bollu
    • 1
  • F. Koch
    • 1
  1. 1.Physik-Department TechnischeUniversität MünchenGarchingFederal Republic of Germany

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