XPS Study of the Interface Between Thermally Evaporated Aluminium and Polyethyleneterephthalate: Evidence for Oxycarbide Species

  • M. Bou
  • J. M. Martin
  • Th. Le Mogne
  • L. Vovelle

Abstract

The interface between in situ thermally evaporated aluminium and a biaxially oriented film of polyethyleneterephthalate (PET) has been studied by X-ray Photoelectron Spectroscopy (XPS). The surface of PET has been characterized before and after metallization. The results of metallization show that the bonding of aluminium atoms with PET occurs at carbonyl sites, as evidenced by the rapid attenuation of carbonyl C1s core level photoemission intensity. This chemical reaction leads to the formation of a C-O-Al complex at the interface. With increasing Al coverage, a new C1s species is also observed at a lower binding energy and is supposed to originate from aluminium carbide-like bonding.

Keywords

Core Level Rutherford Backscattering Spectroscopy Core Level Spectrum Rapid Attenuation Carbonyl Site 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    K.L. Mittal, J. Vac. Sci. Technol., 13, 19 (1976).CrossRefGoogle Scholar
  2. 2.
    J.M. Burkstrand, J. Appl. Phys., 52, 4795 (1981).CrossRefGoogle Scholar
  3. 3.
    P.S. Ho, P.O. Hahn, J.W. Bartha, G.W. Rubloff, F.K. Legoues and B.D. Silvermann, J. Vac. Sci. Technol A3, 739 (1985).Google Scholar
  4. 4.
    J.M. Burkstrand, Appl. Phys. Lett., 33, 387 (1978).CrossRefGoogle Scholar
  5. 5.
    J.M. Burkstrand, J. Vac. Sci. Technol., 16, 1072 (1979).CrossRefGoogle Scholar
  6. 6.
    J.M. Burkstrand, J. Vac. Sci. Technol., 15, 223 (1978).CrossRefGoogle Scholar
  7. 7.
    J.M. Burkstrand, J. Vac. Sci. Technol., 16, 363 (1979).CrossRefGoogle Scholar
  8. 8.
    J.M. Burkstrand, J. Vac. Sci. Technol., 15, 223 (1978).CrossRefGoogle Scholar
  9. 9.
    J.M. Burkstrand, J. Vac. Sci. Technol., 21, 70 (1982).CrossRefGoogle Scholar
  10. 10.
    F. Soeda, K. Hayashi and A. Ishitani, J. Electron Spectros. Related Phenomena, 27, 205 (1982).CrossRefGoogle Scholar
  11. 11.
    J.W. Bartha, P.O. Hahn, F. Legoues and P.S. Ho, J. Vac. Sci. Technol., A3, 1390 (1985).Google Scholar
  12. 12.
    L.J. Atanasoska, S.G. Anderson, H.M. Meyer III, Z. Lin and J.H. Weaver, J. Vac. Sci. Technol., A5, 3325 (1987).Google Scholar
  13. 13.
    H.J. Leary and D.S. Campbell, Surface Interface Anal., 1, 75 (1979).CrossRefGoogle Scholar
  14. 14.
    B.D. Silverman, P.N. Sanda, P.S. Ho and A.R. Rossi, J. Polym. Sei., Polym. Chem. Ed., 23, 2057 (1985).Google Scholar
  15. 15.
    B.D. Silverman, J.W. Bartha, J.G. Clabes, P.S. Ho and A.R. Rossi, J. Polym. Sci., Polym. Chem. Ed., 24, 3325 (1986).CrossRefGoogle Scholar
  16. 16.
    S.G. Anderson, H.M. Meyer III, Lj. Atanasoska and J.W. Weaver, J. Vac. Sci. Technol. A6, 38 (1988).Google Scholar
  17. 17.
    J.J. Pireaux, C. Grégoire, P.A. Thiry, R. Caudano and J.C. Clarke, J. Vac. Sci. Technol., A5, 598 (1987).Google Scholar
  18. 18.
    N.J. DiNardo, J.E. Demuth and T.C. Clarke, J. Vac. Sci. Technol., A4, 1050 (1986).Google Scholar
  19. 19.
    N.J. DiNardo, J.E. Demuth and T.C. Clarke, Chem. Phys. Lett., 121, 239, (1985).CrossRefGoogle Scholar
  20. 20.
    CA. Kovac, J.L. Jordan and R.A. Pollack, Mater. Res. Soc. Symp. Proc., 72, (1986).Google Scholar
  21. 21.
    F.S. Ohuchi and S.C. Freilich, J. Vac. Sci. Technol. A4 1039 (1986).Google Scholar
  22. 22.
    Lj. Atanasoska, H.M. Meyer III, G. Anderson, and J.H. Weaver, J. Vac. Sci. Technol., A6, 2175 (1988).Google Scholar
  23. 23.
    N.J. Chou and C.H. Tang, J. Vac. Sci. Technol. A2, 751 (1984).Google Scholar
  24. 24.
    P.O. Hahn, G.W. Rubloff, J.W. Bartha, F. Legoues, R. Tramp and P.S. Ho, Mater. Res. Soc. Symp. Proc., 40, 251 (1985).CrossRefGoogle Scholar
  25. 25.
    J.L. Jordan, CA. Kovac, J.F. Morac and R.A. Pollack, Phys. Rev., B, 26, 1369 (1987).CrossRefGoogle Scholar
  26. 26.
    P.N. Sanda, J.W. Bartha, B.D. Silverman, P.S. Ho and A.R. Rossi, Mater. Res. Soc. Symp. Proc., 40, 283 (1985).CrossRefGoogle Scholar
  27. 27.
    P.N. Sanda, J.W. Bartha, J.G. Clabes, J.L. Jordan, C Feger, B.D. Silverman and P.S. Ho, J. Vac. Sci. Technol., A4, 1035 (1986).Google Scholar
  28. 28.
    H.M. Meyer III, S.G. Anderson, Lj. Atanasoska and J.H. Weaver, J. Vac. Sci. Technol., A6, 30 (1988).Google Scholar
  29. 29.
    S.G. Anderson, H.M. Meyer, and J.H. Weaver, J. Vac. Sci. Technol., A6 (4), 2205 (1988).Google Scholar
  30. 30.
    B.M. DeKoven and P. Hagans, Appl Surface Sci, 27, 199 (1986).CrossRefGoogle Scholar
  31. 31.
    Y. DePuydt, P. Bertrand and P. Lutgen, Surface Interface Anal, 12, 86 (1988).Google Scholar
  32. 32.
    Y. Jugnet, J.L. Droulas, Tran Minh Duc, and A. Pouchelon, Postdeadline poster, European Conference on Applications of Surface and Interface Analysis, (1989).Google Scholar
  33. 33.
    Y. Jugnet, Tran Minh Duc, and A. Pouchelon, International Conference on Metallization of Polymers, Montreal, Canada (1989).Google Scholar
  34. 34.
    D.T. Clark, in, “Polymer Surfaces”, D.T. Clark and W.J. Feast, editors p 309, Wiley, New York, (1978).Google Scholar
  35. 35.
    D. Briggs and M.P. Sean, “Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy”, (1983).Google Scholar
  36. 36.
    D.W. Dwight, J.E. McGrath and J.P. Wightman, J Appl Polym Sci: Appl Polym Symp, 34, 35, (1978).Google Scholar
  37. 37.
    D.T. Clark, CRC Critical Reviews in Solid State and Materials Sciences, 1, (1978).Google Scholar
  38. 38.
    D.T. Clark, J.W. Feast, W.R.S. Musgrave and I. Ritchie, J. Polymer Sci: Polym Chem. Ed. 1, 857 (1975).CrossRefGoogle Scholar
  39. 39.
    L. Porte, J. Appl. Phys. 60, 635 (1986).CrossRefGoogle Scholar
  40. 40.
    P. Bodo and J.E. Sundgren, J. Vac. Sci. Technol. A2, 1498 (1984).Google Scholar

Copyright information

© Springer Science+Business Media New York 1991

Authors and Affiliations

  • M. Bou
    • 1
  • J. M. Martin
    • 1
  • Th. Le Mogne
    • 1
  • L. Vovelle
    • 2
  1. 1.Ecole Centrale de LyonLaboratoire de Technologie des SurfacesEcully CedexFrance
  2. 2.Rhône Poulenc, C.R.C.Saint FonsFrance

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