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The Effects of In-Plane Stress on Waves in Thin Films

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Nondestructive Characterization of Materials IV

Abstract

The application of acoustoelasticity for the nondestructive evaluation of residual stress has, for the most part, been limited to waves which may be classified as being of short wavelength. For many thin films, whose thicknesses may be on the order of 1 μm or less, the frequency required to obtain a “short wavelength” is well into the gigahertz regime. Thus, for acoustoelasticity to be applicable to such thin films, an improved understanding of the effect of stress on the wave response in the intermediate to long wavelength regimes must be available. This paper considers the effect of stress on the response of waves propagating in plate-like structures. The frequency equation is derived in the context of three-dimensional elastodynamics in which a small disturbance is superposed on a finite deformation of the nonlinearly elastic plate. Particular attention is directed toward the lowest order antisymmetric (flexural) mode which exhibits membrane response in the long wavelength limit. Results showing the details of the transition from the long wavelength limit to the short wavelength limit (bulk wave response) are presented for this mode.

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References

  1. Nix, W. D., Met. Trans., 20A, 2217–2245 (1989).

    CAS  Google Scholar 

  2. Segmueller, A. and M. Murakami, “X-ray Diffraction Analysis of Strains and Stresses in Thin Films,” in Treatise in Materials Science and Technology, 19A, ed. by H. Herman (Academic Press, New York, 1988) pp. 143–200.

    Google Scholar 

  3. Rickerby, D. S, B. A. Bellamy, and A. M. Jones, Surface Engineering, 3, 138–146 (1987).

    Google Scholar 

  4. Flinn, P. A., Mat. Res. Soc. Symp., Proc. Vol. 130, 41–51 (1989).

    Article  CAS  Google Scholar 

  5. Mehregany, M., R. T. Howe, and S. D. Senturia, J. Appl. Phys., 62, 3579–3584 (1987).

    Article  CAS  Google Scholar 

  6. Guckel, H., T. Randazzo, and D. W. Burns, J. Appl. Phys., 57, 1671–1675 (1985).

    Article  CAS  Google Scholar 

  7. Howe, R. T., Thin Solid Films, 181, 235–243 (1989).

    Article  Google Scholar 

  8. Meeks, S. W., D. Peter, D. Home, K. Young and V. Novotny, Appl. Phys. Lett., 55, 1835–1837 (1989).

    Article  CAS  Google Scholar 

  9. Pao, Y. H., W. Sachse and H. Fukuoka, in Physical Acoustics: Principles and Methods, 17, ed. by W. P. Mason and R. N. Thurston, (Academic Press, New York, 1984) pp. 61–143.

    Google Scholar 

  10. Kino, G. S., J. B. Hunter, G. C. Johnson, A. R. Selfridge, D. M. Barnett, G. Herrmann, and C. R. Steele, J. Appl. Phys., 50, 2607–2612 (1979).

    Article  Google Scholar 

  11. Dike, J J. and G. C. Johnson, J. Appl. Mech., 57, 12–17 (1990).

    Article  Google Scholar 

  12. Hsu, N. N., Experimental Mechanics, 14, 169–176 (1974).

    Article  Google Scholar 

  13. Thompson, R. B., S. S. Lee, and J. F. Smith, J. Acoust. Soc. Am., 80, 921–931 (1986).

    Article  Google Scholar 

  14. Man, C. S. and W. Y. Lu, J. Elasticity, 17, 159–182 (1987).

    Article  Google Scholar 

  15. Husson, D., J. Appl. Phys., 57, 1562–1567 (1985).

    Article  Google Scholar 

  16. Liang, K., S. D. Bennett, B. T. Khuri-Yakub, and G. S. Kino, Appl. Phys. Lett., 41, 1124–1126 (1982).

    Article  Google Scholar 

  17. Chen, S. E., “The Influence of Stress on the Dynamic Response of Elastic Layers,” Ph. D. Dissertation, University of California, Berkeley (1989).

    Google Scholar 

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Johnson, G.C., Chen, SE. (1991). The Effects of In-Plane Stress on Waves in Thin Films. In: Ruud, C.O., Bussière, J.F., Green, R.E. (eds) Nondestructive Characterization of Materials IV. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-0670-0_29

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  • DOI: https://doi.org/10.1007/978-1-4899-0670-0_29

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-0672-4

  • Online ISBN: 978-1-4899-0670-0

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