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Preparation of Dense Thin Films by Sol-Gel With Very High Humidity Sensitivity

  • Gualtiero Gusmano
  • Angelo Montenero
  • Enrico Traversa

Abstract

The currently available commercial humidity sensors are mainly based on porous sintered ceramics or on polymeric films.1 Ceramics possess superior properties insofar chemical resistance and mechanical strength are considered,2 but the conventional ceramic technology used for their production is not competitive with polymer sensor fabrication technology. However, the present trend in sensor research is towards the fabrication of integrated sensor, with miniaturization of sensing elements.3 For this aim, the use of thin films is needed, and the recent development of ceramic deposition technologies was a great pulse to study ceramics in film form for chemical sensors. Recently, ceramic thin films fabricated with physical deposition methods, studied as humidity sensors, have shown sensitivities much lower than those measured for porous sintered ceramics, together with very large resistivities.4,5

Keywords

Humidity Sensor Titania Film Ti02 Film Ceramic Film Potassium Titanate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1995

Authors and Affiliations

  • Gualtiero Gusmano
    • 1
  • Angelo Montenero
    • 2
  • Enrico Traversa
    • 1
  1. 1.Dipartimento di Scienze e Tecnologie ChimicheUniversita’ di Roma “Tor Vergata”RomeItaly
  2. 2.Dipartimento di Chimica Generale e Inorganica, Chimica Analitica, Chimica FisicaUniversita’ di ParmaParmaItaly

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