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Surface Studies of Chemically Vapour Deposited Silicon Films Using Scanning Force Microscopy

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Part of the book series: NATO ASI Series ((NSSB,volume 360))

Abstract

A new method for surface diffusion characterization is presented. The measurements conditions for roughness were analysed and the importance of the applied force was proven. The quantitative measurements of friction force versus applied force are presented. The connection between the average friction coefficient and the roughness surface was experimentally demonstrated.

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© 1997 Springer Science+Business Media New York

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Flueraru, C., Cobianu, C., Cosmin, P., Dascalu, D. (1997). Surface Studies of Chemically Vapour Deposited Silicon Films Using Scanning Force Microscopy. In: Tringides, M.C. (eds) Surface Diffusion. NATO ASI Series, vol 360. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-0262-7_64

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  • DOI: https://doi.org/10.1007/978-1-4899-0262-7_64

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-0264-1

  • Online ISBN: 978-1-4899-0262-7

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