Surface Diffusion pp 695-702 | Cite as
Surface Studies of Chemically Vapour Deposited Silicon Films Using Scanning Force Microscopy
Chapter
Abstract
A new method for surface diffusion characterization is presented. The measurements conditions for roughness were analysed and the importance of the applied force was proven. The quantitative measurements of friction force versus applied force are presented. The connection between the average friction coefficient and the roughness surface was experimentally demonstrated.
Keywords
Friction Coefficient Friction Force Applied Force Deposition Temperature Roughness Surface
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