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Precursors for the Chemical Vapor Deposition of Titanium Disulfide and Titanium Nitride Films

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Materials Synthesis and Characterization

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Abstract

The rational design of precursors to binary inorganic materials is enhanced by a detailed understanding of the path that leads to the final product. Chemical Vapor Deposition (CVD), in which gas phase species react to form a film on a surface, has evolved into a very attractive method to prepare thin films of early transition metal chalcogenides, pnictogenides, and carbides.1 Despite the wide use of CVD to fabricate thin films, very little is known about the chemical reactions that are involved in these processes. Recently, we initiated a research program with the goal of understanding ligand intermediates in CVD processes to the above mentioned materials.2 A significant goal was to assess the possible intermediacy of metalligand multiple bonded compounds in CVD processes, since such species have been widely proposed in film deposition mechanisms.3 Herein we describe our recent efforts to prepare precursors to titanium disulfide and titanium nitride films using CVD techniques.

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References

  1. For leading references, see: (a) D.C. Smith, R.R. Rubiano, M.D. Healy, and R.W. Springer, Mater. Res. Soc. Symp. Proc. 282, 643 1993.

    Article  CAS  Google Scholar 

  2. T J. Groshens, C.K. Lowe-Ma, R.C. Scheri, and R.Z. Dalbey, Mater. Res. Soc. Symp. Proc. 282, 299 1993.

    Article  CAS  Google Scholar 

  3. R. Fix, R.G. Gordon, and D.M. Hoffman, Chem. Mater. 3, 1138 1991.

    Article  CAS  Google Scholar 

  4. R. Fix, R.G. Gordon, and D.M. Hoffman, Chem. Mater. 2, 235 1990.

    Article  CAS  Google Scholar 

  5. R. Fix, R.G. Gordon, and D.M. Hoffman, Mater. Res. Soc. Symp. Proc. 168, 357 1990.

    Article  CAS  Google Scholar 

  6. M. Bochmann, I. Hawkins, and L.M. Wilson, J. Chem. Soc, Chem. Commun. 344 1988.

    Google Scholar 

  7. G.S. Girolami, J.A. Jensen, D.M. Pollina, W.S. Williams, A.E. Kaloyeros, and C.M. Alloca, J. Am. Chem. Soc. 109, 1579 1987.

    Article  CAS  Google Scholar 

  8. S.R. Kurtz and R.G. Gordon, Thin Solid Films 140, 277 1986.

    Article  CAS  Google Scholar 

  9. C.H. Winter, P.H. Sheridan, T.S. Lewkebandara, M.J. Heeg, and J.W. Proscia, J. Am. Chem. Soc. 114, 1095 1992.

    Article  CAS  Google Scholar 

  10. C.H. Winter, T.S. Lewkebandara, and J.W. Proscia, Chem. Mater. 4, 1144 1992.

    Article  CAS  Google Scholar 

  11. C.H. Winter, P.H. Sheridan, T.S. Lewkebandara, and J.W. Proscia, Mater. Res. Soc. Symp. Proc. 282, 293 1993.

    Article  CAS  Google Scholar 

  12. C.H. Winter, T.S. Lewkebandara, J.W. Proscia, and A.L. Rheingold, Inorg. Chem. 32, 3807 1993.

    Article  CAS  Google Scholar 

  13. J.W. Proscia, C.H. Winter, G.P. Reck, and G.G. Wen, Mater. Res. Soc. Symp. Proc. 283, 933 1993.

    Article  CAS  Google Scholar 

  14. C.H. Winter, T.S. Lewkebandara, J.W. Proscia, and A.L. Rheingold, Inorg. Chem. 33, 1227 1994.

    Article  CAS  Google Scholar 

  15. T.S. Lewkebandara and C.H. Winter, Angew. Chem., Adv. Mater. 6, 237 1994.

    Article  CAS  Google Scholar 

  16. C.H. Winter, K.C. Jayaratne, and J.W. Proscia, Mat. Res. Soc. Symp. Proc. 327, 103 1994.

    Article  CAS  Google Scholar 

  17. C.H. Winter, V.C. Viejo, and J.W. Proscia, Mat. Res. Soc. Symp. Proc. 327, 109 1994.

    Article  CAS  Google Scholar 

  18. T.S. Lewkebandara, P.H. Sheridan, M.J. Heeg, A.L. Rheingold, and C.H. Winter, Inorg. Chem. 33, in press 1994.

    Google Scholar 

  19. For example, see: (a) R. Fix, R.G. Gordon, and D.M. Hoffman, J. Am. Chem. Soc. 112, 7833 1990.

    Article  CAS  Google Scholar 

  20. M. Nandi, D. Rhubright, and A. Sen, Inorg. Chem. 29, 3066 1990.

    Article  Google Scholar 

  21. D.C. Bradley, Chem. Rev. 89, 1317 1989.

    Article  CAS  Google Scholar 

  22. For leading references to the use of TiS2 as cathodes in lithium batteries, see: Lithium Battery Technology; H.V. Venkatasetty, Ed.; Wiley-Interscience: New York, 1984. K. Kanehori, K. Matsumoto, K. Miyauchi, and T. Kudo, Solid State Ionics 9/10, 1445 1983.

    Article  Google Scholar 

  23. M.S. Whittingham, Prog. Solid State Chem. 12, 41 1978.

    Article  CAS  Google Scholar 

  24. J.A. Wilson, and D.A. Yoffe, Adv. Phys. 18, 193 1969.

    Article  CAS  Google Scholar 

  25. B. Scrosati, Electrochim. Acta. 26, 1559 1981.

    Article  CAS  Google Scholar 

  26. CVD routes to TiS2 films: (a) K. Kanehori, F. Kirino, K. Miyauchi, and T. Kudo, J. Electrochem. Soc. 136, 1265 1989.

    Article  CAS  Google Scholar 

  27. S. Kikkawa, M. Miyazaki, and M. Koizumi, J. Mater. Res. 5, 2894 1990.

    Article  CAS  Google Scholar 

  28. K. Kanehori, Y. Ito, F. Kirino, K. Miyauchi, and T. Kudo, Solid State Ionics 18/19, 818 1986.

    Article  Google Scholar 

  29. D. Zehnder, C. Deshpandey, B. Dunn, and R.F. Bunshah, Solid State Ionics 18/19, 813 1986.

    Article  Google Scholar 

  30. Z. Ogumi, Y. Uchimoto, and Z.I. Takehara, J. Power Sources 26, 457 1989.

    Article  CAS  Google Scholar 

  31. Y. Kanemori, Z. Ogumi, and Z.I. Takehara, GS News Tech. Rep. 46, 21 1987.

    Google Scholar 

  32. H.S.W. Chang and D.M. Schleich, J. Solid State Chem. 100, 62 1992.

    Article  CAS  Google Scholar 

  33. For other routes to TiS2 films, see: G. Meunier, R. Dormoy, and A. Levasseur, Mater. Sci. Eng., B B3, 19 1989.

    Article  Google Scholar 

  34. T. Uchida, Y. Fuji, and M. Wakihara, Proc.-Electrochem. Soc. 88, 401 1988.

    Google Scholar 

  35. For leading references, see: R.C. Bill, Wear 106, 283 1985. J. Newnham and K. Singh, Sci.Tech. Aerosp. Rep. 15, Abstr. No. N77-32323 1977.

    Article  CAS  Google Scholar 

  36. A.M. Zuev and A.G. Klabakov, Tr., Chelyab. Politekh. Inst. 152, 127 1974. Chem. Abstr. 87, 120191f 1977.

    CAS  Google Scholar 

  37. V. Hopkins and M. Campbell, Lubr. Eng. 33, 252 1977.

    CAS  Google Scholar 

  38. B.D. McConnell, Natl. Bur. Stand. (U.S.) Spec. Publ. 452, 124 1976.

    CAS  Google Scholar 

  39. For a discussion of the semimetal versus semiconductor properties of TiS2, see: P.B. Perry, Phys. Rev. B 13, 5211 1976.

    Article  CAS  Google Scholar 

  40. L.E. Conroy and K.C. Park, Inorg. Chem. 7, 549 1968.

    Google Scholar 

  41. Handbook of Chemistry and Physics, D.R. Lide, Ed., CRC Press, Boca Raton, Florida, 1992–1993, Vol. 74, pp 4-109.

    Google Scholar 

  42. B. Viard, M. Poulain, D. Grandjean, and J. Amaudrut, Inorg. Chem. 32, 347 1993.

    Article  Google Scholar 

  43. G. Maier, U. Siepp, and R. Boese, Tetrahedron Lett. 4515 1987.

    Google Scholar 

  44. M. Handlovic, D. Miklos, and M. Zikmund, Acta Crystallogr. B37, 811 1987.

    Google Scholar 

  45. K.B. Williams, O. Stewart, G.P. Reck, and J.W. Proscia, Mat. Res. Soc. Symp. Proc. 327, 121 1994.

    Article  CAS  Google Scholar 

  46. H. Mackle, Tetrahedron 19, 1159 1963. See also:.

    Article  CAS  Google Scholar 

  47. J.A. Kerr, Chem. Rev. 66, 465 1966.

    Article  CAS  Google Scholar 

  48. Refractory Materials, edited by J.L. Margrave, Academic Press, New York, 1971.

    Google Scholar 

  49. R. Buhl, H.K. Pulker, and E. Moll, Thin Solid Films 80, 264 1981.

    Article  Google Scholar 

  50. For leading references, see: W.D. Münz, D. Hofmann, and K. Hartig, Thin Solid Films 96, 79 1982.

    Article  Google Scholar 

  51. For leading references, see: M. Erola, J. Keinonen, A. Antilla, and J. Koskinen, Solar Energy Mater. 12, 353 1985.

    Article  CAS  Google Scholar 

  52. A. Schlegel, P. Wachtert, J.J. Nickl, and H. Lingg, J. Phys. C: Solid State Phys. 10, 4889, 1977.

    Article  CAS  Google Scholar 

  53. For leading references, see: C. Ernsberger, J. Nickerson, A. Miller, and K. Banks, J. Vac. Sci. Technol. A 3 2303 1985.

    Google Scholar 

  54. M. Wittmer, B. Studet, and H. Melchior, J. Appl. Phys. 52, 5722 1981.

    Article  CAS  Google Scholar 

  55. For example, see: C.Y. Ting, J. Vac. Sci. Technol. 21, 14 1982.

    Article  CAS  Google Scholar 

  56. W. Schintlmeister, O. Pacher, and K. Pfaffinger, J. Electrochem. Soc. 123, 924 1976.

    Article  CAS  Google Scholar 

  57. For example, see: M. Wittmer, J. Vac. Sci. Technol. A 3, 1797 1985.

    Article  CAS  Google Scholar 

  58. K. Sugiyama, S. Pac, Y. Takahashi, and S. Motojima, J. Electrochem. Soc. 122, 1545 1975.

    Article  CAS  Google Scholar 

  59. R. Fix, R.G. Gordon, and D.M. Hoffman, Chem. Mater. 2, 235 1990.

    Article  CAS  Google Scholar 

  60. G.M. Brown, Inorg. Chem. 28, 3028 1989.

    Article  CAS  Google Scholar 

  61. K. Ikeda, M. Maeda, and Y. Aritta, Proc. Symp. VLSI Technol. 61 1990.

    Google Scholar 

  62. M.E. Gross and T. Siegrist, Inorg. Chem. 31, 4898 1992. For other recent attempts to prepare precursors, see:.

    Article  CAS  Google Scholar 

  63. S.R. Drake, K.D. Sanderson, M.B. Hursthouse, and K.M.A. Malik, Polyhedron 13, 181 1994.

    Article  CAS  Google Scholar 

  64. F. Laurent, O. Cyr-Athis, J.-P. Legros, R. Choukroun, and L. Valade, New J. Chem. 18, 575 1994.

    CAS  Google Scholar 

  65. A. Novak, Struct. Bonding (Berlin) 18, 177 1974.

    Article  CAS  Google Scholar 

  66. W.A. Nugent and J.M. Mayer, Metal-Ligand Multiple Bonds, Wiley Interscience, New York, 1988, pp 123–125.

    Google Scholar 

  67. C.C. Amato, J.B. Hudson, and L.V. Interrante, Mater. Res. Soc. Symp. Proc. 168, 119 1990.

    Article  CAS  Google Scholar 

  68. L.V. Interrante, G.A. Sigel, M. Garbauskas, C. Hejna, and G.A. Slack, Inorg. Chem. 28, 252 1989.

    Article  CAS  Google Scholar 

  69. D.L. Thorn, W.A. Nugent, and R.L. Harlow, J. Am. Chem. Soc. 103, 357 1981.

    Article  CAS  Google Scholar 

  70. Y. Bai, H.W. Roesky, H.-G. Schmidt, and M. Noltemeyer, Z. Naturforsch. 47b, 603 1992.

    Google Scholar 

  71. C.T. Vroegop, J.H. Teuben, F. van Bolhuis, and J.G.M. van der Linden, J. Chem. Soc., Chem. Commun. 550 1983.

    Google Scholar 

  72. Z.Y. Chen and A.W. Castleman, J. Chem. Phys. 98, 231 1993.

    Article  CAS  Google Scholar 

  73. For examples of early transition metal nitride cage compounds, see: M.M.B. Holl and P.T. Wolczanski, J. Am. Chem. Soc. 114, 3854 1992.

    Google Scholar 

  74. G.M. Brown and L. Maya, J. Am. Ceram. Soc. 71, 78 1988.

    Article  CAS  Google Scholar 

  75. L. Maya, Inorg. Chem. 26, 1459 1987.

    Article  CAS  Google Scholar 

  76. Y. Saeki, R. Matsuzaki, A. Yajima, and M. Akiyama, Bull. Chem. Soc. Jpn. 55, 3193 1982.

    Article  CAS  Google Scholar 

  77. P. Dunn, Aust. J. Chem. 13, 225 1960. J. Cueilleron and M. Charret, Bull. Soc. Chim. Fr. 802 1956.

    Article  CAS  Google Scholar 

  78. M. Antler and A.W. Laubengayer, J. Am. Chem. Soc. 77, 5250 1955. G.W.A. Fowles and F.H. Pollard, J. Chem. Soc. 2588 1953.

    Article  CAS  Google Scholar 

  79. K. Nakamoto, Infrared and Raman Spectra of Inorganic and Coordination Compounds, Wiley, New York, 1986, pp 111–117.

    Google Scholar 

  80. A. Sherman, Jpn. J. Appl. Phys. 30, 3553 1991.

    Article  CAS  Google Scholar 

  81. T. Akahori, A. Tahihara, and M. Tano, J. Appl. Phys. 30, 3553 1991.

    Article  Google Scholar 

  82. C.H. Winter, T.S. Lewkebandara, and A.L. Rheingold, manuscript in preparation.

    Google Scholar 

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  1. Department of Chemistry, Wayne State University, Detroit, MI, 48202, USA

    Charles H. Winter

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  1. Charles H. Winter
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  1. Lawrence Berkeley National Laboratory, Berkeley, California, USA

    Dale L. Perry

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Winter, C.H. (1997). Precursors for the Chemical Vapor Deposition of Titanium Disulfide and Titanium Nitride Films. In: Perry, D.L. (eds) Materials Synthesis and Characterization. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-0145-3_5

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  • DOI: https://doi.org/10.1007/978-1-4899-0145-3_5

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