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Preparation and Applications of Amorphous Silicon

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Crystalline Semiconducting Materials and Devices

Part of the book series: Physics of Solids and Liquids ((PSLI))

Abstract

This chapter is concerned with the preparation, properties, and possible applications of amorphous silicon (a-Si) prepared by the glow-discharge (gd) decomposition of silane. There were a number of important fundamental developments during the 1970s that established the considerable applied potential of this material and led to the present rapid growth in its use in commercial products. The first of these was the discovery,(1–4) as early as 1972, that a-Si prepared by the gd technique possesses a very low density of states in the mobility gap, probably the most important single factor in its applied potential. A direct result of this has been the development of the a-Si field-effect transistor (FET), discussed in Section 16.3, which could find applications in large-area addressable displays, in addressable image-sensing arrays, and in logic circuits.

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References

  1. W. E. Spear and P. G. LeComber, J. Non-Cryst. Solids 8–10, 727–738 (1972).

    Article  ADS  Google Scholar 

  2. A. Madan, P. G. LeComber, and W. E. Spear, J. Non-Cryst. Solids 20, 239–257 (1976).

    Article  ADS  Google Scholar 

  3. A. Madan and P. G. LeComber, Proc. 7th Int. Conf. on Amorphous and Liquid Semiconductors, Edinburgh (W. E. Spear, ed.), pp. 377–381, CICL, Univ. of Edinburgh (1977).

    Google Scholar 

  4. P. G. LeComber, Fundamental Physics of Amorphous Semiconductors (F. Yonezawa, ed.), pp. 46–55, Springer-Verlag, Berlin (1981).

    Chapter  Google Scholar 

  5. W. E. Spear and P. G. LeComber, Solid State Commun. 17, 1193–1196 (1975).

    Article  ADS  Google Scholar 

  6. W. E. Spear and P. G. LeComber, Philos. Mag. 33, 935–949 (1976).

    Article  ADS  Google Scholar 

  7. See, for example, Proc. 10th Int. Conf. on Amorphous and Liquid Semiconductors, Tokyo, 1983, published in J. Non-Cryst. Solids 59/60 (1983).

    Google Scholar 

  8. H. F. Sterling and R. C. G. Swann, Solid State Electron. 8, 653–654 (1965).

    Article  ADS  Google Scholar 

  9. R. C. Chittick, J. H. Alexander, and H. F. Sterling, J. Electrochem. Soc. 116, 77–81 (1969).

    Article  Google Scholar 

  10. P. G. LeComber and W. E. Spear, Phys. Rev. Lett. 25, 509–511 (1970).

    Article  ADS  Google Scholar 

  11. P. G. LeComber, A. Madan, and W. E. Spear, J. Non-Cryst. Solids 11, 219–234 (1972).

    Article  ADS  Google Scholar 

  12. Y. Kuwano and M. Ohnishi, J. Phys. (Paris) 42, Suppl. C4, 1155–1164 (1981).

    Google Scholar 

  13. T. Hamasaki, M. Ueda, A. Chayahara, M. Hirose, and Y. Osaka, Jpn. J. Appl. Phys. 23, L81–82 (1984); see also Appl. Phys. Lett. 44, 600–602 (1984).

    Article  ADS  Google Scholar 

  14. B. A. Scott, M. H. Brodsky, D. C. Green, P. B. Kirby, R. M. Plecenik, and E. E. Simonyi, Appl. Phys. Lett. 37, 725 (1980).

    Article  ADS  Google Scholar 

  15. W. E. Spear, in: Amorphous and Liquid Semiconductors (J. Stuke and W. Brenig, eds.), pp. 1–16, Taylor and Francis, London (1974).

    Google Scholar 

  16. P. G. LeComber, W. E. Spear, and A. Ghaith, Electron. Lett. 15, 179–181 (1979).

    Article  Google Scholar 

  17. A. J. Snell, K. D. Mackenzie, W. E. Spear, P. G. LeComber, and A. J. Hughes, Appl. Phys. 24, 357–362 (1981).

    Article  ADS  Google Scholar 

  18. P. G. LeComber, A. J. Snell, K. D. Mackenzie, and W. E. Spear, J. Phys. (Paris) 42, Suppl. C4, 423–432 (1981).

    Google Scholar 

  19. A. J. Snell, W. E. Spear, P. G. LeComber, and K. D. Mackenzie, Appl. Phys. A26, 83–86 (1981).

    Article  Google Scholar 

  20. A. J. Snell, A. Doghmane, P. G. LeComber, and W. E. Spear, Appl. Phys. A34, 175–178 (1984).

    Google Scholar 

  21. K. D. Mackenzie, A. J. Snell, I. French, P. G. LeComber, and W. E. Spear, Appl. Phys. A31, 87–92 (1983).

    Article  Google Scholar 

  22. I. D. Fench, A. J. Snell, P. G. LeComber, and J. H. Stephen, Appl. Phys. A31, 19–22 (1983).

    Google Scholar 

  23. M. Matsumura and H. Hayama, Proc. IEEE 68, 1349–1350 (1980).

    Article  Google Scholar 

  24. M. Matsumura, H. Hayama, Y. Nara, and K. Ishibashi, IEEE EDL-1, 182–184 (1980).

    Google Scholar 

  25. W. E. Spear, P. G. LeComber, S. Kinmond, and M. H. Brodsky, Appl. Phys. Lett. 28, 105–107 (1976).

    Article  ADS  Google Scholar 

  26. D. E. Carlson and C. R. Wronski, Appl. Phys. Lett. 28, 671–673 (1976).

    Article  ADS  Google Scholar 

  27. See, for instance, Y. Hamakawa, J. Non-Cryst. Solids 59/60, 1265–1272 (1983) and many other relevant papers in the same volume (Proc. Tokyo Conf. on Amorphous and Liquid Semiconductors).

    Article  ADS  Google Scholar 

  28. R. A. Gibson, P. G. LeComber, and W. E. Spear, Appl. Phys. 21, 307–311 (1980).

    Article  ADS  Google Scholar 

  29. K. Seki, H. Yamamoto, A. Sasano, and T. Tsukuda, J. Non-Cryst. Solids 59/60, 1179–1182 (1983).

    Article  ADS  Google Scholar 

  30. I. Shimizu, S. Oda, K. Saito, H. Tomita, and E. Inoue, J. Phys. (Paris) 42, Suppl. C4, 1123–1130 (1981).

    Google Scholar 

  31. A. E. Owen, P. G. LeComber, G. Sarrabayrouse, and W. E. Spear, IEE Proc. 129, 51–54 (1982).

    Google Scholar 

  32. A. E. Owen, P. G. LeComber, W. E. Spear, and J. Hajto, J. Non-Cryst. Solids 59/60, 1273–1280 (1983).

    Article  ADS  Google Scholar 

  33. P. G. LeComber, A. E. Owen, W. E. Spear, and J. Hajto, in: Semiconductors and Semimetals (R. K. Willardson and A. C. Beer, eds.), Ch. 15, Vol. 21, Part D. Academic Press, New York (1984).

    Google Scholar 

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© 1986 Springer Science+Business Media New York

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LeComber, P.G. (1986). Preparation and Applications of Amorphous Silicon. In: Butcher, P.N., March, N.H., Tosi, M.P. (eds) Crystalline Semiconducting Materials and Devices. Physics of Solids and Liquids. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-9900-2_16

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  • DOI: https://doi.org/10.1007/978-1-4757-9900-2_16

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4757-9902-6

  • Online ISBN: 978-1-4757-9900-2

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