Abstract
Similarly to SIMS, ion scattering spectroscopy (ISS) is a surface-sensitive technique that is the result of the interactions between an ion beam and a solid target. More precisely, the ions coming from a monoenergetic ion beam scattered by the surface of the material to be investigated are energetically analyzed in a given direction. Generally rare gas ions are used. This technique is also called LEIS or low-energy ion scattering because the energy of the primary ions is generally small (200 to 2000 eV) to avoid large target surface modifications.
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Grimblot, J., Abon, M. (1994). Ion Scattering Spectroscopy. In: Imelik, B., Vedrine, J.C. (eds) Catalyst Characterization. Fundamental and Applied Catalysis. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-9589-9_12
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DOI: https://doi.org/10.1007/978-1-4757-9589-9_12
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