Abstract
The surface morphology of a variety of thin films such as diamond thin films and coated powders have been evaluated by atomic force microscope (AFM). This study demonstrates the use of AFM as a technique for the optimization of thin film deposition and coating process. A discussion for surface roughness evaluation is presented. Also, the force acting for roughness evaluation is discussed.
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© 1997 Springer Science+Business Media New York
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Li, G. (1997). Surface Characteristics Evaluation of Thin Films by Atomic Force Microscopy. In: Cohen, S.H., Lightbody, M.L. (eds) Atomic Force Microscopy/Scanning Tunneling Microscopy 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-9325-3_26
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DOI: https://doi.org/10.1007/978-1-4757-9325-3_26
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4757-9327-7
Online ISBN: 978-1-4757-9325-3
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