Surface Characteristics Evaluation of Thin Films by Atomic Force Microscopy

Abstract

The surface morphology of a variety of thin films such as diamond thin films and coated powders have been evaluated by atomic force microscope (AFM). This study demonstrates the use of AFM as a technique for the optimization of thin film deposition and coating process. A discussion for surface roughness evaluation is presented. Also, the force acting for roughness evaluation is discussed.

Keywords

Atomic Force Microscope Diamond Film Thin Film Deposition Diamond Thin Film Chemical Vapor Deposit Diamond Film 
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Copyright information

© Springer Science+Business Media New York 1997

Authors and Affiliations

  • G. Li
    • 1
  1. 1.Center for Advanced MaterialsUniversity of Massachusetts at LowellLowellUSA

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