Surface Characteristics Evaluation of Thin Films by Atomic Force Microscopy
The surface morphology of a variety of thin films such as diamond thin films and coated powders have been evaluated by atomic force microscope (AFM). This study demonstrates the use of AFM as a technique for the optimization of thin film deposition and coating process. A discussion for surface roughness evaluation is presented. Also, the force acting for roughness evaluation is discussed.
KeywordsAtomic Force Microscope Diamond Film Thin Film Deposition Diamond Thin Film Chemical Vapor Deposit Diamond Film
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