Advances in Piezoresistive Cantilevers for Atomic Force Microscopy
Piezoresistive cantilevers offer a novel detection scheme for Atomic Force Microscopy (AFM) in which no optics and no alignments are required to measure the deflection of the cantilever. The cantilever deflection is measured through the resistance of a stress sensitive resistor—a piezoresistor—integrated in the silicon cantilever. The use of piezoresistive cantilevers simplifies the operation of the microscope, especially for applications in ultrahigh vacuum (UHV) and at low temperature, where other detection schemes are difficult to implement. This paper reviews the principle of operation of piezoresistive cantilevers and presents recent results obtained using piezoresistive cantilevers for imaging in air, in water, in ultra high vacuum, at low temperature, on magnetic samples, for lateral force microscopy, in-contact and noncontact modes.
KeywordsAtomic Force Microscopy Spring Constant Scanning Force Microscope Silicon Cantilever Tunneling Mode
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