The Scanning Probe Microscope as a Metrology Tool
Linearity of the piezoelectric scanner is critical to using the scanning probe microscope as a metrology tool. In this paper, the inherent nonlinearities associated with piezoelectric materials and scanners synthesized from them are described both macroscopically and microscopically. Various corrections to the nonlinearities are presented and compared.
KeywordsPiezoelectric Material Scanning Probe Microscope Cross Coupling Measurement Grid Software Correction
Unable to display preview. Download preview PDF.