Linearity and Calibration of Scanning Probe Microscope Images

  • Paul E. West
  • Renee Jobe
  • Tim Van Slambrouck


Scanning probe microscopes rely on piezoelectric ceramics for scanning a probe across a sample surface. Artifacts in SPM images are a result of the nonlinearity, hysteresis, and creep in piezoelectric ceramics. Examples of the artifacts in SPM images created by piezoelectric scanners and methods for correcting these artifacts are presented.


Scanning Probe Microscope Piezoelectric Ceramic Profiler Standard Probe Geometry Scanning Probe Microscope Image 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media New York 1994

Authors and Affiliations

  • Paul E. West
    • 1
  • Renee Jobe
    • 1
  • Tim Van Slambrouck
    • 1
  1. 1.TopoMetrix CorporationSanta ClaraUSA

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