Semiconductor Integrated Photonic Transducer Chip for High-Resolution Displacement Measurement
Optical displacement measurement using interferometric techniques is a well established and technologically advanced discipline. Two of the limitations which may be encountered in applying an optical approach to high-resolution determination of distances or movements, however, are optical system size and robustness. The use of semiconductor integrated optics for optical interferometry can circumvent these restrictions: photonic integrated circuits1 (PICs) are typically quite small and monolithic integration of the various components can result in a microsystem of considerable physical ruggedness.
KeywordsMichelson Interferometer Paul Scherrer Institute Side Mode Suppression Ratio Grin Lens Environmental Refractive Index
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