Abstract
A light controlled optical modulator is demonstrated which is based on the micromachining and thermal bonding of silicon. It consists of two silicon wafers, one n-type and one p-type bonded to each other so that a pn junction is formed. Using micromachining technique, an optical cavity is prepared with a wall depth of 1 µm bordered on one side by a membrane of about 8.5 µm thickness. Using two light sources with different wavelengths, the intensity of transmitted light from one light source, can be controlled by non-penetrating light from the second light source. The device structure is analyzed by simulation.
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References
N. A. F. Jaeger, and L. Young, “Voltage-induced optical wave guide modulator in lithium niobate”, IEEE J. Quantum Electron., QE-23:1673 (1989)
J. A. Davis, J. Ganlieli and G. W. Bach, “Optical transmission and contrast ratio studies of the magnetooptical spatial light modulator”, Appl. Opt. 27:5194 (1988)
T. D. Hudson, R. K. Worcester and D. A. Gregory, “Performance characteristics of an optically addressed ferroelectric liquid-crystal spatial light modulator”, Appl. Opt. 30:2867 (1991)
S.-T. Wu, “Nematic liquid crystal modulator with response time less than 100 µs at room temperature”, Appl.Phys.Lett. 57:986 (1990)
H. K. Kang, J. B. D. Soole, H. P. LeBlanc, R. Bhat, M. A. Koza and I. H. White, “Efficient InGaAsP/InP multiple quantum well waveguide optical phase modulator”, Appl.Phys.Lett. 57: 2285 (1990)
O. Solgaard, F. S. A. Sandejas and D. M. Bloom, “Deformable grating optical modulator” Opt. Lett. 17:688 (1992)
Z. Xiao S. Norrman and O. Engström, “A micro pn junction structure sensor for measuring voltage on high potentials”, Sensors and Actuators A 41:432 (1994)
Z. Xiao, S. Norrman and O. Engström, “A novel micro sensor structure sensor for voltage on high potentials or low pressure”, Proceeding of “The 7th International Conference on Solid State Sensors and Actuators (Transducers’93)”, Yokohama, Japan, (1993)
Hiroyuki Fujita and Toshiaki Ikoma “Numerical determination of the electromechanical fiield for a micro servosystem“ Sensors and Actuators, A21:215 (1990)
K. Kinosita, “Numerical evaluation of the intensity curve of multiple-beam Fizeau fringe“, J. Phys. Soc. Japan 8:219 (1953)
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© 1995 Springer Science+Business Media New York
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Xiao, Z., Engström, O. (1995). A Light Controlled Optical Modulator in Silicon Technology. In: Lampropoulos, G.A., Chrostowski, J., Measures, R.M. (eds) Applications of Photonic Technology. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-9247-8_95
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DOI: https://doi.org/10.1007/978-1-4757-9247-8_95
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4757-9249-2
Online ISBN: 978-1-4757-9247-8
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