A Light Controlled Optical Modulator in Silicon Technology

  • Z. Xiao
  • O. Engström


A light controlled optical modulator is demonstrated which is based on the micromachining and thermal bonding of silicon. It consists of two silicon wafers, one n-type and one p-type bonded to each other so that a pn junction is formed. Using micromachining technique, an optical cavity is prepared with a wall depth of 1 µm bordered on one side by a membrane of about 8.5 µm thickness. Using two light sources with different wavelengths, the intensity of transmitted light from one light source, can be controlled by non-penetrating light from the second light source. The device structure is analyzed by simulation.


Lithium Niobate Transmitted Intensity Spatial Light Modulator Thermal Bonding Fizeau Interferometer 
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Copyright information

© Springer Science+Business Media New York 1995

Authors and Affiliations

  • Z. Xiao
    • 1
  • O. Engström
    • 1
  1. 1.Department of Solid State ElectronicsChalmers University of TechnologyGöteborgSweden

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