Optimized IR Diffra Ctive Optical Elements
Diffractive Optical Elements (DOEs) 1 were designed and fabricated to operate at 1.064 µm with apertures of 8 mm and F/Nos that varied from F/32 to F/42, 3. The designs were made using two-level and four-level lithography as well as the laser write technique.
KeywordsDiffraction Efficiency Zone Plate Optical Path Difference Thickness Profile Diffractive Optical Element
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