YBCO Deposition by Thermal Evaporation

  • B. Utz
  • R. Semerad
  • S. Rieder-Zecha
  • E. Kobler
  • P. Berberich
  • H. Kinder
Part of the Advances in Cryogenic Engineering book series (ACRE, volume 44)

Abstract

High quality YBCO films can be grown by reactive thermal coevaporation of Y, Ba and Cu. Single and double sided YBCO thin films are deposited on single crystal wafers up to 8" diameter by rotation of the substrates above a fixed oxygen pocket. Films fabricated on IBAD buffered polycrystalline YSZ substrates show superconducting properties comparable to single crystal substrates.

A modified setup is presented which allows to grow YBCO on 20×20 cm2 deposition area on fixed substrates in a continuous process. The metal fluxes are individually controlled by atomic absorption spectroscopy while the evaporation boats are refillable in-situ. First results show that the superconducting properties of films fabricated with this system are comparable to YBCO grown with the rotating substrate scheme.

Keywords

Sapphire Substrate Atomic Absorption Spectroscopy Superconducting Property Deposition Area YBCO Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    P. Berberich, J. Tate, W. Dietsche, H. Kinder, Appl. Phys. Lett. 53 (1988), 925ADSCrossRefGoogle Scholar
  2. 2.
    P. Berberich, B. Utz, W. Prusseit, H. Kinder, „Homogeneous high quality YBCO films on 3 and 4 substrates, Physica C 219 (1994), 497ADSCrossRefGoogle Scholar
  3. 3.
    J. Wiesmann, K. Heinemann, H.C. Freyhardt, this volumeGoogle Scholar
  4. 4.
    B. Utz, S. Rieder-Zecha, H. Kinder, „Continuous YBCO film deposition by optically controlled reactive thermal co-evaporation”, IEEE Trans. Appl Supercond., Vol. 7 (1997), 1181Google Scholar

Copyright information

© Springer Science+Business Media New York 1998

Authors and Affiliations

  • B. Utz
    • 1
  • R. Semerad
    • 2
  • S. Rieder-Zecha
    • 2
  • E. Kobler
    • 2
  • P. Berberich
    • 2
  • H. Kinder
    • 2
  1. 1.Siemens AGErlangenGermany
  2. 2.Physics Department E10Technical University of MunichGarchingGermany

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