Abstract
Devices can be made with decreasing linear dimensions until one of two limitations is reached, namely
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Limitations imposed by the physical principles by which the device operates
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Limitations imposed by our ability to fabricate the device to the required dimensions and tolerances
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Brodie, I., Muray, J.J. (1992). Limits to Nanofabrication. In: Brodie, I., Muray, J.J. (eds) The Physics of Micro/Nano-Fabrication. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-6775-9_7
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DOI: https://doi.org/10.1007/978-1-4757-6775-9_7
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