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Microcharacterization

  • Ivor Brodie
  • Julius J. Muray
Chapter
Part of the Microdevices book series (MDPF)

Abstract

Having built a device consisting of elements made to nanometer tolerances, it is often necessary to examine it to see whether the device was built as specified and whether the components are of the required materials with the desired physical properties.

Keywords

Parallel Imaging Rutherford Backscattering Spectrometry Secondary Emission Aperture Stop Scanning Acoustic Microscope 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1992

Authors and Affiliations

  • Ivor Brodie
    • 1
  • Julius J. Muray
    • 1
  1. 1.SRI InternationalMenlo ParkUSA

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