Preliminary Survey

  • Ivor Brodie
  • Julius J. Muray
Part of the Microdevices book series (MDPF)


This chapter is intended to enable those readers with no previous experience in the subject matter to gain a brief overview of the evolution of microfabrication technologies from the needs of the electronic microcircuit industry, which was born with the invention of the transistor in late 1947.(13–16)*


Planar Processing Etch Rate Plasma Etching Bipolar Transistor Preliminary Survey 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media New York 1992

Authors and Affiliations

  • Ivor Brodie
    • 1
  • Julius J. Muray
    • 1
  1. 1.SRI InternationalMenlo ParkUSA

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