Polarization Spectroscopy of High-Frequency Discharges
The present chapter is devoted to the study and exploitation of the polarization of the emission spectrum of a high-frequency discharge for sensing its parameters. Contrary to the emission or absorption intensity, the polarization of the optical emission in the linear spectrum was not used so widely as a tool for quantitative diagnostics until recently.
KeywordsStokes Parameter Velocity Distribution Function Multipole Moment Capacitive Discharge Alignment Tensor
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