Conclusions and Outlook
A new type of thermally actuated micromirror capable of one- and two-dimensional scanning has been presented. This work involves a complete study of the thermal bimorph actuator, an adapted inexpensive technological process development, analytical models and simulations for the dynamic behavior of the microscanner, characterization and testing of the devices and finally their evaluation for specific applications. An important feature of the developed microscanner is its simplicity, which makes it a cost effective component. Obtaining high fabrication yields and inexpensive devices is still a great challenge for MEMS components.
KeywordsPorous Silicon Porous Silicon Layer Tunable Filter Mask Level Light Incidence Angle
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