Abstract
One of the most popular applications of nanoindentation is the determination of the mechanical properties of thin films. In nanoindentation tests, the properties of the film may be measured without removing the film from the substrate as is done in other types of testing. The spatial distribution of properties, in both lateral and depth dimensions, may be measured, and a wide variety of films are amenable to the technique, from ion-implanted surfaces to optical coatings and polymer films Apart from testing films in-situ, nanoindentation techniques can also be used for films made as free-standing microbeams or membranes.1
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References
T.P. Weihs, S. Hong, J.C. Bravman, and W.D. Nix, “Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films,” J. Mater. Res. 3 5, 1988, 931–942.
J.L. Hay, M.E. O’Hem, and W.C. Oliver, “The importance of contact radius for substrate-independent property measurement of thin films,” Mat. Res. Soc. Symp. Proc. 522, 1998, pp. 27–32.
M.G.D. El-Sherbiney and J. Hailing, “The Herztian contact of surfaces covered with metallic films,” Wear, 40, 1976, pp. 325–337.
J.A. Ogilvy, “A parametric elastic model for indentation testing of thin films,” J. Phys. D: Appl. Phys. 26, 1993, pp. 2123–2131.
R.B. King, “Elastic analysis of some punch problems for a layered medium,” Int. J. Solids Structures, 23 12, 1987, pp. 1657–1664.
M.F. Doemer and W.D. Nix, “A method of interpreting the data from depth-sensing indentation instruments,” J. Mater. Res. 1 4, 1986, pp. 601–609.
H. Gao, C-H Chiu, and J. Lee, “Elastic contact versus indentation modeling of multi-layered materials,” Int. J. Solids Structures, 29 20, 1992, pp. 2471–2492.
N. Schwarzer, M. Whittling, M. Swain, and F. Richter, “The analytical solution of the contact problem of spherical indenters on layered materials: Application for the investigation of TiN films on silicon,” Thin Solid Films, 270 1–2, 1995, pp. 371–375.
N. Schwarzer, “Coating design due to analytical modelling of mechanical contact problems on multilayer systems,” Surf Coat. Technol. 133, 2000, pp. 397–402.
H. Buckle, in J.W. Westbrook and H. Conrad, eds. The Science of Hardness Testing and its Applications,American Society for Metals, Metals Park, OH, 1973, pp. 453–491.
B. Jonsson and S. Hogmark, “Hardness measurements of thin films,” Thin Solid Films, 114, 1984, pp. 257–269.
P.J. Burnett and D.S. Rickerby, “The mechanical properties of wear-resistance coatings I: Modelling of hardness behaviour,” Thin Solid Films, 148, 1987, pp. 41–50.
P.J. Burnett and D.S. Rickerby, “The mechanical properties of wear-resistance coatings II: Experimental studies and interpretation of hardness,” Thin Solid Films, 148, 1987, pp. 51–65.
T.Y. Tsui, C.A. Ross, and G.M. Pharr, “A method for making substrate-independent hardness measurements of soft metallic films on hard substrates by nanoindentation,” J. Mater. Res. 18 6, 2003, pp. 1383–1391.
A.K. Bhattacharya and W.D. Nix, “Finite element simulation of indentation experiments,” Int. J. Solids Structures, 24 12, 1988, pp. 1287–1298.
D. Stone, W.R. LaFontaine, P. Alexopolous, T.-W. Wu, and Che-Yu Li, “An investigation of hardness and adhesion of sputter-deposited aluminium on silicon by utilizing a continuous indentation test,” J. Mater. Res. 3 1, 1988, pp. 141–147.
S.J. Bull, “Modelling of the mechanical and tribological properties of coatings and surface treatments,” Mat. Res. Symp. Proc. 750, 2003, pp. Y6.1.1-Y6. 1. 12.
G.G. Stoney, “The tension of metallic films deposited by electrolysis,” Proc. Roy. Soc. A9, 1909, pp. 172–175.
D.B. Marshall and A.G. Evans, “Measurement of adherence of residually stressed thin films by indentation mechanics of interface delamination,” J. Appl. Phys. 56 10, 1984, pp. 2632–2638.
L.G. Rosenfeld, J.E. Ritter, T.J. Lardner, and M.R. Lin, “Use of the microindentation technique for determining interfacial fracture energy,” J. Appl. Phys. 67 1990, pp. 3291–3296.
M.D. Thouless, Acta Metall. 36, 1988, pp. 3131
M.V. Swain and J. Mencik, “Mechanical property characterization of thin films using spherical tipped indenters,” Thin Solid Films, 253, 1994, pp. 204–211.
A.J. Whitehead and T.F. Page, “Nanoindentation studies of thin film coated systems,” Thin Solid Filins, 220, 1992, pp. 277–283.
M.D. Thouless, “An analysis of spalling in the microscratch test,” Eng. Fract. Mech. 61, 1998, pp. 75–81.
M.D. Kriese, N.R. Moody, and W.W. Gerberich, “Effects of annealing and interlayers on the adhesion energy of copper thin films to SiO2/Si substrates,” Acta Mater. 46, 1998, pp. 6623–6630.
A. A. Volinsky, N.R. Moody, and W.W. Gerberich, “Superlayer residual stress effect on the indentation adhesion measurements,” Mat. Res. Soc. Symp. Proc. 594, 2000, pp. 383–388.
J. Sekler, P.A. Steinmann, and H.E. Hintermann, “The scratch test: Different critical load determination techniques,” Surface and Coatings Technology, 36, 1988, pp. 519–529.
N. Gane and J. Skinner, “The friction and scratch deformation of metals on a micro scale,” Wear, 24, 1973, pp. 207–217.
P.A. Steinmann, Y. Tardy, and H.E. Hintermann, “Adhesion testing by the scratch test method: The influence of intrinsic and extrinsic parameters on the critical load,” Thin Solid Films, 154, 1987, pp. 333–349.
V.D. Jardret and W.C. Oliver, “Viscoelastic behaviour of polymer films during scratch test: A quantitative analysis,” Mat. Res. Soc. Symp. Proc. 594, 2000, pp. 251–256.
S. Enders, P. Grau, and G. Berg, “Mechanical characterization of surfaces by nanotribological measurements of sliding and abrasive terms,” Mat. Res. Soc. Symp. Proc. 594, 2000, pp. 531–536.
F.P. Bowden and D. Tabor, The Friction and Lubrication of Solids, Oxford University Press, Oxford, 1950.
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Fischer-Cripps, A.C. (2004). Nanoindentation of Thin Films. In: Nanoindentation. Mechanical Engineering Series. Springer, New York, NY. https://doi.org/10.1007/978-1-4757-5943-3_8
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DOI: https://doi.org/10.1007/978-1-4757-5943-3_8
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