Nanoindentation of Thin Films

  • Anthony C. Fischer-Cripps
Part of the Mechanical Engineering Series book series (MES)


One of the most popular applications of nanoindentation is the determination of the mechanical properties of thin films. In nanoindentation tests, the properties of the film may be measured without removing the film from the substrate as is done in other types of testing. The spatial distribution of properties, in both lateral and depth dimensions, may be measured, and a wide variety of films are amenable to the technique, from ion-implanted surfaces to optical coatings and polymer films Apart from testing films in-situ, nanoindentation techniques can also be used for films made as free-standing microbeams or membranes.1


Residual Stress Thin Solid Film Scratch Test Strain Energy Release Rate Nanoindentation Test 
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Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • Anthony C. Fischer-Cripps
    • 1
  1. 1.CSIROLindfieldAustralia

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