Excimer lasers

  • C. Fotakis
  • C. Kalpouzos
  • T. Papazoglou
Part of the Engineering Lasers and Their Applications book series (LSAS, volume 2)

Abstract

Excimer lasers, celebrating over two decades of development, have reached a level of maturity which makes them attractive for a variety of applications. Currently, excimer lasers play a key role in many specific applications that utilise their unique features, for diverse applications in material processing, remote sensing, biomedicine and research in basic physics. The interplay between the available excimer laser technology and the quality of applications is critical. On the one hand there are new demanding applications which require short wavelengths and tunability, and higher standards of excimer laser technology. On the other hand there is an increasing competition from convenient solid state laser systems emitting in the near infrared (IR), whose output can be extended with high efficiency at shorter wavelengths.

Keywords

Fuse Silica Excimer Laser Fuse Quartz Imaging Defect Seed Pulse 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media Dordrecht 1998

Authors and Affiliations

  • C. Fotakis
  • C. Kalpouzos
  • T. Papazoglou

There are no affiliations available

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