Excimer lasers

  • C. Fotakis
  • C. Kalpouzos
  • T. Papazoglou
Part of the Engineering Lasers and Their Applications book series (LSAS, volume 2)


Excimer lasers, celebrating over two decades of development, have reached a level of maturity which makes them attractive for a variety of applications. Currently, excimer lasers play a key role in many specific applications that utilise their unique features, for diverse applications in material processing, remote sensing, biomedicine and research in basic physics. The interplay between the available excimer laser technology and the quality of applications is critical. On the one hand there are new demanding applications which require short wavelengths and tunability, and higher standards of excimer laser technology. On the other hand there is an increasing competition from convenient solid state laser systems emitting in the near infrared (IR), whose output can be extended with high efficiency at shorter wavelengths.


Fuse Silica Excimer Laser Fuse Quartz Imaging Defect Seed Pulse 
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  1. Babcock, C.L. (1977) Silicate Glass Technology Methods, John Wiley & Sons, New YorkGoogle Scholar
  2. Bennett, H.E. (1978) Opt. Eng., 17, p480–486 Escher, G.C. (1988) Proc. of the SPIE, 998, p30–37Google Scholar
  3. Fontaine, B.L. et. al., (1987) CLEO Technical Digest,p310Google Scholar
  4. Franceschini, M.A. (1992) SPIE, 1810, p435CrossRefGoogle Scholar
  5. Golde M.C. and Thrush, B.A. (1974) Chem. Phys. Lett. 29 pGoogle Scholar
  6. Golde, M.F. (1975) J. Mol. Spectroscopy 58, p261Google Scholar
  7. Hueber, J.M. et al., (1991) SPIE 1503 Hueber, J.M. et al., (1992) SPIE 1810 Google Scholar
  8. Kingslake, R. (1978) Lens Design Fundamentals, Academic Press, New YorkGoogle Scholar
  9. Krauss M. and Mies F.H. (1979) in Excimer Lasers (ed. Ch. K. Rhodes), p5, Springer Verlag.Google Scholar
  10. Lacour, B. et al., (1992) SPIE 1810, (eds. C. Fotakis, K. Kalpouzos and Th. Papazoglou ), p368Google Scholar
  11. Long, W.H. Jr, Plummer M.J., and Stappaerts E., (1989) Applied Physics Letters 43, p735CrossRefGoogle Scholar
  12. Luk, T.S., (1989) Opt. Lett. 14, p1113, McKee, T.J., (1991) Applied Optics 30, p365Google Scholar
  13. Montagne, J. E., Inglesakis, G. and Autric, M., (1992) SPIE, 1810, p447 Nabekawa,Y. (1993), Opt. Lett. 18, p1922Google Scholar
  14. Rebhan, U. et al., (1995) SPIE 2502, p426CrossRefGoogle Scholar
  15. Rebhan, U., Nikolaus, B. and Basting, D. (1994) in Excimer Lasers (ed. L.D. Laude), pl, Kluwer Academic publishersGoogle Scholar
  16. Ronki, M. et al., (1978) IEEE, J. Quant. Electronics 14, p464 Searles S.K. and Hart, G.A. (1975) Appl. Phys. Lett. 27, p243Google Scholar
  17. Setta, J.J. et al., (1988) Proc. of the SPIE, 970, p179–191CrossRefGoogle Scholar
  18. Stehle, M. (1993) in Excimer Lasers,(ed. L. D. Laude), NATO Series E-265,15,.Google Scholar
  19. Sze, R.C. (1983) Journal of Applied Physics, 54, p1227 Taylor, A.J. (1990) Opt. Lett. 15, p39Google Scholar
  20. Taylor, R.S. (1986) Appl. Phys. B41 plGoogle Scholar
  21. Taylor, R.S. and Leopold, K.E. (1986)Applied Physics Letters 47, p81Google Scholar
  22. Taylor, R.S. and Leopold, K.E. (1989) Journal of Applied Physics, 65, p22 Velazco, J.E. and Setser, D.W. (1975) IEEE J. Quant. Electron. 11, p708Google Scholar

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© Springer Science+Business Media Dordrecht 1998

Authors and Affiliations

  • C. Fotakis
  • C. Kalpouzos
  • T. Papazoglou

There are no affiliations available

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