Instrumentation for Energy-Loss Spectroscopy

  • R. F. Egerton


Complete characterization of a specimen in terms of its inelastic scattering would involve recording the scattered intensity J (x, y, z, θ x , θ y , E) as a function of position (coordinates x, y, z) within the specimen and as a function of scattering angle (components θ x and θ y ) and energy loss E. Even if technically feasible, such a procedure would involve storing a vast amount of information, so in practice the acquisition of energy-loss data is restricted to the following categories (see Fig. 2.1).


Yttrium Aluminum Garnet Wien Filter Chromatic Aberration Fringe Field Detective Quantum Efficiency 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media New York 1996

Authors and Affiliations

  • R. F. Egerton
    • 1
  1. 1.University of AlbertaEdmontonCanada

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