Instrumentation for Energy-Loss Spectroscopy

Abstract

Complete characterization of a specimen in terms of its inelastic scattering would involve recording the scattered intensity J (x, y, z, θ _x , θ _y , E) as a function of position (coordinates x, y, z) within the specimen and as a function of scattering angle (components θ _x and θ _y ) and energy loss E. Even if technically feasible, such a procedure would involve storing a vast amount of information, so in practice the acquisition of energy-loss data is restricted to the following categories (see Fig. 2.1).