Data Mining for High Quality and Quick Response Manufacturing
As the manufacturing industry becomes more and more competitive, both intelligent process control and fast manufacturing cycle time are more crucial than ever. Recently, semiconductor manufacturing has become increasingly complex due to device size reduction and consequently, those objectives become necessities in the survival and can be achieved through optimal sampling strategy utilizing inspection resources effectively without incurring a loss in quality or output. We propose a new and better application of data mining in developing an optimal measurement sampling method for process parameter monitoring in a wafer fab and illustrate the effectiveness of proposed sampling method using actual fab data. The results indicate that if the sampling chip locations and their size are chosen rationally by data mining, that sampling can provide a good sensitivity of 100% wafer coverage and defect detection for high quality and quick response manufacturing in spite of smaller sampling size.
KeywordsSimilarity Criterion Semiconductor Manufacturing Winning Neuron High Similarity Score Chip Location
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