• Srinivasan Sivaram


This chapter is different from the rest of the book. It is not directly pertinent to the art or science of CVD; instead it deals with the development process. It provides a framework to increase the efficiency with which processes can be made manufacturable. I believe this framework should be a prerequisite for all process/equipment engineers who hope to work in the microelectronic industry.


Chemical Vapor Deposition Control Chart Passivation Film Microelectronic Industry Step Coverage 
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© Springer Science+Business Media New York 1995

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  • Srinivasan Sivaram

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