Thin Film Phenomena

  • Srinivasan Sivaram


Before we begin to address each of the subprocesses that constitute CVD, it is worthwhile to understand some of the general concepts of thin film growth. Conditions during film growth affect many of the properties of thin films. The importance of early stages of thin film growth on the final film properties cannot be overemphasized. In this chapter, we describe the processes that occur during this stage of growth and correlate the growth conditions to physical, mechanical, and electrical properties of the film.


Chemical Vapor Deposition Surface Free Energy Film Growth Physical Vapor Deposition Critical Nucleus 
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© Springer Science+Business Media New York 1995

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  • Srinivasan Sivaram

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