Determination of Layer Thicknesses of Single Layers and Multilayers

  • Ullrich Pietsch
  • Václav Holý
  • Tilo Baumbach
Part of the Advanced Texts in Physics book series (ADTP)

Abstract

The measurement of layer thickness is a basic problem, and can be solved both by x-ray reflection and x-ray diffraction (see [121] for a review). In both methods, the thickness of a thin layer can be determined from the angular positions of the subsidiary maxima on the reflection (or diffraction) curves.

Keywords

Critical Angle Bragg Peak Reflectivity Curve Diffraction Curve Total External Reflection 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • Ullrich Pietsch
    • 1
  • Václav Holý
    • 2
  • Tilo Baumbach
    • 3
  1. 1.Institute of PhysicsUniversity of PotsdamPotsdamGermany
  2. 2.Department of Solid State PhysicsMasaryk UniversityBrnoCzech Republic
  3. 3.Institut fuer SynchrotronstrahlungForschungszentrum Karlsruhe in der Helmholtz-GemeinschaftKarlsruheGermany

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