X-Ray Scattering from Self-Organized Structures

  • Ullrich Pietsch
  • Václav Holý
  • Tilo Baumbach
Part of the Advanced Texts in Physics book series (ADTP)


A promising method for fabricating low-dimensional systems is based on processes of self-organization taking place during epitaxial growth under suitable growth conditions. In contrast to the lithographically based techniques, the self-organization method can pattern large areas of the substrate (even whole substrate wafers) and it is also less time-consuming. The disadvantage of this method lies in its statistical nature. Resulting arrays of nano-objects are not exactly periodic and homogeneous. In this context, x-ray methods as tools for the investigation of the structure quality of the arrays are of extraordinary importance.


Quantum Wire Lateral Maximum Step Bunch SiGe Island Monolayer Step 
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Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • Ullrich Pietsch
    • 1
  • Václav Holý
    • 2
  • Tilo Baumbach
    • 3
  1. 1.Institute of PhysicsUniversity of PotsdamPotsdamGermany
  2. 2.Department of Solid State PhysicsMasaryk UniversityBrnoCzech Republic
  3. 3.Institut fuer SynchrotronstrahlungForschungszentrum Karlsruhe in der Helmholtz-GemeinschaftKarlsruheGermany

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