Other CVD Polymers

  • Jeffrey B. Fortin
  • Toh-Ming Lu


In addition to the Parylene family, there are several classes of polymer that have been shown to form thin film by evaporation or via chemical vapor deposition routes. Among them, rigid-rod aromatic polymers, due to their structure, possess several very attractive properties that have a great potential for many applications such as protective coating. They possess high thermal stability, high glass transition temperature, high hardness, insolubility to common solvents, and oxidation resistance. Although these films possess very desirable properties, only limited work has been reported in this area of research. In this Chapter, we will describe a selective group of polymeric films deposited via different types of vapor deposition techniques.


Phthalic Anhydride High Glass Transition Temperature Lower Deposition Rate Vapor Deposition Technique Diamine Monomer 
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Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • Jeffrey B. Fortin
    • 1
    • 2
  • Toh-Ming Lu
    • 3
  1. 1.Department of Engineering ScienceRensselaer Polytechnic InstituteTroyUSA
  2. 2.GE Global Research CenterNiskayunaUSA
  3. 3.Department of PhysicsRensselaer Polytechnic InstituteTroyUSA

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