Abstract
The starting material for the deposition of parylene film is a dimer in the form of a white powder. This dimer can be purchased through a number of companies in the US and abroad, including Para Tech Coating, Inc. (visit http://www.parylene.com) and Speedline Technologies (visit http://www.scscookson.com). The dimer for parylene-N, which is also called di-para-xylylene and [2,2]paracyclophane was first reported by Brown as a product of xylene pyrolysis and later was synthesized with high yield by Cram [77]. According to Beach et al., there are two common routes to the synthesis of the dimer, di-para-xylyene; the direct pyrolysis of p-xylene and the 1,6 Hoffman elimination of amine from a quaternary ammonium hydroxide [1]. Beach et al. also state that purification of the dimer is often accomplished by recrystallization from the solvent xylene.
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© 2004 Springer Science+Business Media New York
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Fortin, J.B., Lu, TM. (2004). Parylene-N Precursor Chemistry. In: Chemical Vapor Deposition Polymerization. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-3901-5_4
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DOI: https://doi.org/10.1007/978-1-4757-3901-5_4
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4419-5413-8
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