Parylene-N Precursor Chemistry

  • Jeffrey B. Fortin
  • Toh-Ming Lu


The starting material for the deposition of parylene film is a dimer in the form of a white powder. This dimer can be purchased through a number of companies in the US and abroad, including Para Tech Coating, Inc. (visit and Speedline Technologies (visit The dimer for parylene-N, which is also called di-para-xylylene and [2,2]paracyclophane was first reported by Brown as a product of xylene pyrolysis and later was synthesized with high yield by Cram [77]. According to Beach et al., there are two common routes to the synthesis of the dimer, di-para-xylyene; the direct pyrolysis of p-xylene and the 1,6 Hoffman elimination of amine from a quaternary ammonium hydroxide [1]. Beach et al. also state that purification of the dimer is often accomplished by recrystallization from the solvent xylene.


Fragmentation Pattern Pyrolysis Temperature Deposition Chamber Pyrolysis Zone NIST Chemistry WebBook 
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Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • Jeffrey B. Fortin
    • 1
    • 2
  • Toh-Ming Lu
    • 3
  1. 1.Department of Engineering ScienceRensselaer Polytechnic InstituteTroyUSA
  2. 2.GE Global Research CenterNiskayunaUSA
  3. 3.Department of PhysicsRensselaer Polytechnic InstituteTroyUSA

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