Step-by-Step Guide to Depositing Parylene

  • Jeffrey B. Fortin
  • Toh-Ming Lu


In this chapter we will present a step-by-step procedure that one would use to deposit parylene using a typical deposition system. The steps for your deposition will most likely deviate from these but they are not meant to be followed exactly but more to give the general understanding of the process of parylene deposition.


Deposition Rate Cold Trap Deposition Chamber Diffusion Pump Mechanical Pump 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • Jeffrey B. Fortin
    • 1
    • 2
  • Toh-Ming Lu
    • 3
  1. 1.Department of Engineering ScienceRensselaer Polytechnic InstituteTroyUSA
  2. 2.GE Global Research CenterNiskayunaUSA
  3. 3.Department of PhysicsRensselaer Polytechnic InstituteTroyUSA

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