Micromachined scanning mirrors are interesting for a wide variety of applications because of their potential low cost, high speed, low power consumption, and reliability. These mirrors can offer significant advantages over macro-scale mirrors, but the fundamental limitations of scanning mirrors have not been widely discussed. In this dissertation we have derived the range of performance, in terms of resonant frequency and optical resolution, that can be achieved using scanning mirrors, and have shown that MEMS-scale scanning mirrors offer fundamental advantages over the macro-scale scanning mirrors commercially available today.
KeywordsDynamic Deformation Optical Resolution Beam Steering Polysilicon Film Resonant Scanning
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